JPS6410606U - - Google Patents
Info
- Publication number
- JPS6410606U JPS6410606U JP10590787U JP10590787U JPS6410606U JP S6410606 U JPS6410606 U JP S6410606U JP 10590787 U JP10590787 U JP 10590787U JP 10590787 U JP10590787 U JP 10590787U JP S6410606 U JPS6410606 U JP S6410606U
- Authority
- JP
- Japan
- Prior art keywords
- plating
- reflected light
- film
- plated
- stirring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 8
- 238000003756 stirring Methods 0.000 claims description 3
- 230000001427 coherent effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10590787U JPS6410606U (enExample) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10590787U JPS6410606U (enExample) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410606U true JPS6410606U (enExample) | 1989-01-20 |
Family
ID=31338940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10590787U Pending JPS6410606U (enExample) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410606U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03123268U (enExample) * | 1990-03-28 | 1991-12-16 | ||
| JPH0416704A (ja) * | 1990-05-10 | 1992-01-21 | Matsushita Electric Ind Co Ltd | 光学的膜厚モニター及びこれを用いたスパッタリング装置 |
-
1987
- 1987-07-10 JP JP10590787U patent/JPS6410606U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03123268U (enExample) * | 1990-03-28 | 1991-12-16 | ||
| JPH0416704A (ja) * | 1990-05-10 | 1992-01-21 | Matsushita Electric Ind Co Ltd | 光学的膜厚モニター及びこれを用いたスパッタリング装置 |
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