JPS6399910U - - Google Patents

Info

Publication number
JPS6399910U
JPS6399910U JP19656286U JP19656286U JPS6399910U JP S6399910 U JPS6399910 U JP S6399910U JP 19656286 U JP19656286 U JP 19656286U JP 19656286 U JP19656286 U JP 19656286U JP S6399910 U JPS6399910 U JP S6399910U
Authority
JP
Japan
Prior art keywords
flow rate
fluid
valve
mass flow
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19656286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19656286U priority Critical patent/JPS6399910U/ja
Publication of JPS6399910U publication Critical patent/JPS6399910U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
  • Details Of Flowmeters (AREA)
JP19656286U 1986-12-19 1986-12-19 Pending JPS6399910U (sk)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19656286U JPS6399910U (sk) 1986-12-19 1986-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19656286U JPS6399910U (sk) 1986-12-19 1986-12-19

Publications (1)

Publication Number Publication Date
JPS6399910U true JPS6399910U (sk) 1988-06-29

Family

ID=31155500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19656286U Pending JPS6399910U (sk) 1986-12-19 1986-12-19

Country Status (1)

Country Link
JP (1) JPS6399910U (sk)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596212B2 (ja) * 1978-08-25 1984-02-09 文夫 碓井 強化合成樹脂管製造用加振圧入装置
JPS60189020A (ja) * 1984-03-08 1985-09-26 Toshiba Corp プロセス流量制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596212B2 (ja) * 1978-08-25 1984-02-09 文夫 碓井 強化合成樹脂管製造用加振圧入装置
JPS60189020A (ja) * 1984-03-08 1985-09-26 Toshiba Corp プロセス流量制御装置

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