JPS6399910U - - Google Patents
Info
- Publication number
- JPS6399910U JPS6399910U JP19656286U JP19656286U JPS6399910U JP S6399910 U JPS6399910 U JP S6399910U JP 19656286 U JP19656286 U JP 19656286U JP 19656286 U JP19656286 U JP 19656286U JP S6399910 U JPS6399910 U JP S6399910U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- fluid
- valve
- mass flow
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measuring Volume Flow (AREA)
- Details Of Flowmeters (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19656286U JPS6399910U (enExample) | 1986-12-19 | 1986-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19656286U JPS6399910U (enExample) | 1986-12-19 | 1986-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6399910U true JPS6399910U (enExample) | 1988-06-29 |
Family
ID=31155500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19656286U Pending JPS6399910U (enExample) | 1986-12-19 | 1986-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6399910U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS596212B2 (ja) * | 1978-08-25 | 1984-02-09 | 文夫 碓井 | 強化合成樹脂管製造用加振圧入装置 |
| JPS60189020A (ja) * | 1984-03-08 | 1985-09-26 | Toshiba Corp | プロセス流量制御装置 |
-
1986
- 1986-12-19 JP JP19656286U patent/JPS6399910U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS596212B2 (ja) * | 1978-08-25 | 1984-02-09 | 文夫 碓井 | 強化合成樹脂管製造用加振圧入装置 |
| JPS60189020A (ja) * | 1984-03-08 | 1985-09-26 | Toshiba Corp | プロセス流量制御装置 |