JPS6399666U - - Google Patents

Info

Publication number

JPS6399666U

JPS6399666U JP19464386U JP19464386U JPS6399666U JP S6399666 U JPS6399666 U JP S6399666U JP 19464386 U JP19464386 U JP 19464386U JP 19464386 U JP19464386 U JP 19464386U JP S6399666 U JPS6399666 U JP S6399666U

Authority

JP

Japan

Prior art keywords

ion

ion beam

receiving means

potential

implantation apparatus

Prior art date

1986-12-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010884 ion-beam technique Methods 0.000 claims description 12
• 238000001514 detection method Methods 0.000 claims description 3
• 238000005468 ion implantation Methods 0.000 claims 3
• 229910001423 beryllium ion Inorganic materials 0.000 claims 2
• 230000007257 malfunction Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000005259 measurement Methods 0.000 description 1