JPS6399666U - - Google Patents
Info
- Publication number
- JPS6399666U JPS6399666U JP19464386U JP19464386U JPS6399666U JP S6399666 U JPS6399666 U JP S6399666U JP 19464386 U JP19464386 U JP 19464386U JP 19464386 U JP19464386 U JP 19464386U JP S6399666 U JPS6399666 U JP S6399666U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- ion beam
- receiving means
- potential
- implantation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005468 ion implantation Methods 0.000 claims 3
- 229910001423 beryllium ion Inorganic materials 0.000 claims 2
- 230000007257 malfunction Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19464386U JPS6399666U (OSRAM) | 1986-12-17 | 1986-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19464386U JPS6399666U (OSRAM) | 1986-12-17 | 1986-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6399666U true JPS6399666U (OSRAM) | 1988-06-28 |
Family
ID=31151803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19464386U Pending JPS6399666U (OSRAM) | 1986-12-17 | 1986-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6399666U (OSRAM) |
-
1986
- 1986-12-17 JP JP19464386U patent/JPS6399666U/ja active Pending
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