JPS6399083U - - Google Patents
Info
- Publication number
- JPS6399083U JPS6399083U JP19505186U JP19505186U JPS6399083U JP S6399083 U JPS6399083 U JP S6399083U JP 19505186 U JP19505186 U JP 19505186U JP 19505186 U JP19505186 U JP 19505186U JP S6399083 U JPS6399083 U JP S6399083U
- Authority
- JP
- Japan
- Prior art keywords
- port
- valve
- passage
- cylinder
- bypass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Fluid-Driven Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19505186U JPH0325481Y2 (ro) | 1986-12-17 | 1986-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19505186U JPH0325481Y2 (ro) | 1986-12-17 | 1986-12-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6399083U true JPS6399083U (ro) | 1988-06-27 |
| JPH0325481Y2 JPH0325481Y2 (ro) | 1991-06-03 |
Family
ID=31152582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19505186U Expired JPH0325481Y2 (ro) | 1986-12-17 | 1986-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325481Y2 (ro) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7187011B2 (ja) * | 2018-09-07 | 2022-12-12 | 株式会社フジキン | アクチュエータ、バルブ、流体供給システム、および半導体製造装置 |
-
1986
- 1986-12-17 JP JP19505186U patent/JPH0325481Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325481Y2 (ro) | 1991-06-03 |