JPS6398666U - - Google Patents

Info

Publication number

JPS6398666U

JPS6398666U JP19503386U JP19503386U JPS6398666U JP S6398666 U JPS6398666 U JP S6398666U JP 19503386 U JP19503386 U JP 19503386U JP 19503386 U JP19503386 U JP 19503386U JP S6398666 U JPS6398666 U JP S6398666U

Authority

JP

Japan

Prior art keywords

silicon substrate

diaphragm

measurement pressure

pressure sensor

semiconductor pressure

Prior art date

1986-12-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000000758 substrate Substances 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• 238000005259 measurement Methods 0.000 claims 2
• 239000013078 crystal Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000000034 method Methods 0.000 description 3