JPS6398629U - - Google Patents
Info
- Publication number
- JPS6398629U JPS6398629U JP19500386U JP19500386U JPS6398629U JP S6398629 U JPS6398629 U JP S6398629U JP 19500386 U JP19500386 U JP 19500386U JP 19500386 U JP19500386 U JP 19500386U JP S6398629 U JPS6398629 U JP S6398629U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- container
- coating
- discharge pipe
- back surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19500386U JPS6398629U (OSRAM) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19500386U JPS6398629U (OSRAM) | 1986-12-18 | 1986-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398629U true JPS6398629U (OSRAM) | 1988-06-25 |
Family
ID=31152491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19500386U Pending JPS6398629U (OSRAM) | 1986-12-18 | 1986-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398629U (OSRAM) |
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1986
- 1986-12-18 JP JP19500386U patent/JPS6398629U/ja active Pending