JPS6397850U - - Google Patents
Info
- Publication number
- JPS6397850U JPS6397850U JP19233986U JP19233986U JPS6397850U JP S6397850 U JPS6397850 U JP S6397850U JP 19233986 U JP19233986 U JP 19233986U JP 19233986 U JP19233986 U JP 19233986U JP S6397850 U JPS6397850 U JP S6397850U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- gas
- predetermined temperature
- gas detection
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19233986U JPS6397850U (en:Method) | 1986-12-16 | 1986-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19233986U JPS6397850U (en:Method) | 1986-12-16 | 1986-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6397850U true JPS6397850U (en:Method) | 1988-06-24 |
Family
ID=31147325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19233986U Pending JPS6397850U (en:Method) | 1986-12-16 | 1986-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6397850U (en:Method) |
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1986
- 1986-12-16 JP JP19233986U patent/JPS6397850U/ja active Pending