JPS6397253U - - Google Patents

Info

Publication number

JPS6397253U

JPS6397253U JP19204386U JP19204386U JPS6397253U JP S6397253 U JPS6397253 U JP S6397253U JP 19204386 U JP19204386 U JP 19204386U JP 19204386 U JP19204386 U JP 19204386U JP S6397253 U JPS6397253 U JP S6397253U

Authority

JP

Japan

Prior art keywords

protective film

semiconductor substrate

lead electrode

layer

diffused resistor

Prior art date

1986-12-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

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• 239000000758 substrate Substances 0.000 claims description 3
• 239000003513 alkali Substances 0.000 claims description 2
• 238000009792 diffusion process Methods 0.000 claims description 2
• 229910052751 metal Inorganic materials 0.000 claims description 2
• 239000002184 metal Substances 0.000 claims description 2
• 230000001681 protective effect Effects 0.000 claims 5
• 239000004065 semiconductor Substances 0.000 claims 3
• 239000012670 alkaline solution Substances 0.000 claims 1
• 229910052782 aluminium Inorganic materials 0.000 claims 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
• 238000005530 etching Methods 0.000 claims 1
• 238000010030 laminating Methods 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 229910052681 coesite Inorganic materials 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1

Cited By (1)