JPS6397234U - - Google Patents
Info
- Publication number
- JPS6397234U JPS6397234U JP1986192182U JP19218286U JPS6397234U JP S6397234 U JPS6397234 U JP S6397234U JP 1986192182 U JP1986192182 U JP 1986192182U JP 19218286 U JP19218286 U JP 19218286U JP S6397234 U JPS6397234 U JP S6397234U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- heat
- tube
- resistant
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986192182U JPS6397234U (enExample) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986192182U JPS6397234U (enExample) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6397234U true JPS6397234U (enExample) | 1988-06-23 |
Family
ID=31147018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986192182U Pending JPS6397234U (enExample) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6397234U (enExample) |
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1986
- 1986-12-12 JP JP1986192182U patent/JPS6397234U/ja active Pending