JPS6395242U - - Google Patents
Info
- Publication number
- JPS6395242U JPS6395242U JP19008186U JP19008186U JPS6395242U JP S6395242 U JPS6395242 U JP S6395242U JP 19008186 U JP19008186 U JP 19008186U JP 19008186 U JP19008186 U JP 19008186U JP S6395242 U JPS6395242 U JP S6395242U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- guide member
- attached
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19008186U JPS6395242U (de) | 1986-12-10 | 1986-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19008186U JPS6395242U (de) | 1986-12-10 | 1986-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6395242U true JPS6395242U (de) | 1988-06-20 |
Family
ID=31142967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19008186U Pending JPS6395242U (de) | 1986-12-10 | 1986-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6395242U (de) |
-
1986
- 1986-12-10 JP JP19008186U patent/JPS6395242U/ja active Pending
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