JPS6395242U - - Google Patents
Info
- Publication number
- JPS6395242U JPS6395242U JP19008186U JP19008186U JPS6395242U JP S6395242 U JPS6395242 U JP S6395242U JP 19008186 U JP19008186 U JP 19008186U JP 19008186 U JP19008186 U JP 19008186U JP S6395242 U JPS6395242 U JP S6395242U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- guide member
- attached
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
Landscapes
- Pile Receivers (AREA)
Description
第１図は本考案の一実施例を示すウエハ搬送装
置の一部を破断して示す側面図、第２図同装置の
キヤリアが傾いた時の様子を示す図、第３図はキ
ヤリアの部分斜視図である。第４図は従来のウエ
ハ搬送装置の一部を破断して示す側面図、第５図
は同装置内にウエハが搬入された時の様子を示す
平面断面図である。
１……エレベータテーベル、２……ガイド部材
、３……キヤリア、４……ガイド駆動手段、５…
…ウエハ検知手段。
Fig. 1 is a partially cutaway side view of a wafer transfer device showing an embodiment of the present invention, Fig. 2 is a view showing the state when the carrier of the same device is tilted, and Fig. 3 is a portion of the carrier. FIG. FIG. 4 is a partially cutaway side view of a conventional wafer transfer device, and FIG. 5 is a plan cross-sectional view showing how a wafer is carried into the device. DESCRIPTION OF SYMBOLS 1... Elevator table, 2... Guide member, 3... Carrier, 4... Guide drive means, 5...
...Wafer detection means.
Claims (1)
部材と、 該ガイド部材の後面と前記テーブルとにわたつ
て取付けられたガイド駆動手段と、 前面に形成された開口からウエハを収容すると
ともに、前記ガイド部材に載置されたキヤリアと
、 該キヤリアにウエハを搬入する搬送手段と、 この搬送手段によつて搬送されるウエハが前記
キヤリア内に搬入するタイミングを検知するウエ
ハ検知手段とよりなり、 ウエハ検知手段から出力される信号に基づいて
、前記ガイド駆動手段及びテーブルが所定の動作
を行うことを特徴とするウエハ搬送装置。[Claims for Utility Model Registration] A table that is driven up and down, a guide member that is pivotally supported and attached to the table, and a guide drive means that is attached to the rear surface of the guide member and the table. , a carrier that accommodates the wafer through an opening formed on the front surface and is placed on the guide member; a transport means for transporting the wafer into the carrier; and a wafer transported by the transport means within the carrier. What is claimed is: 1. A wafer transfer device comprising: a wafer detection means for detecting the timing of loading a wafer into a wafer; the guide drive means and the table perform predetermined operations based on a signal output from the wafer detection means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19008186U JPS6395242U (en) | 1986-12-10 | 1986-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19008186U JPS6395242U (en) | 1986-12-10 | 1986-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6395242U true JPS6395242U (en) | 1988-06-20 |
Family
ID=31142967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19008186U Pending JPS6395242U (en) | 1986-12-10 | 1986-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6395242U (en) |
-
1986
- 1986-12-10 JP JP19008186U patent/JPS6395242U/ja active Pending
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