JPS6394610U - - Google Patents

Info

Publication number
JPS6394610U
JPS6394610U JP18903586U JP18903586U JPS6394610U JP S6394610 U JPS6394610 U JP S6394610U JP 18903586 U JP18903586 U JP 18903586U JP 18903586 U JP18903586 U JP 18903586U JP S6394610 U JPS6394610 U JP S6394610U
Authority
JP
Japan
Prior art keywords
attached
axis head
sliding
vane
annular space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18903586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18903586U priority Critical patent/JPS6394610U/ja
Publication of JPS6394610U publication Critical patent/JPS6394610U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drilling And Boring (AREA)
JP18903586U 1986-12-10 1986-12-10 Pending JPS6394610U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18903586U JPS6394610U (OSRAM) 1986-12-10 1986-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18903586U JPS6394610U (OSRAM) 1986-12-10 1986-12-10

Publications (1)

Publication Number Publication Date
JPS6394610U true JPS6394610U (OSRAM) 1988-06-18

Family

ID=31140960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18903586U Pending JPS6394610U (OSRAM) 1986-12-10 1986-12-10

Country Status (1)

Country Link
JP (1) JPS6394610U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023520204A (ja) * 2020-04-03 2023-05-16 アプライド マテリアルズ インコーポレイテッド 基板の両側から孔を形成する方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023520204A (ja) * 2020-04-03 2023-05-16 アプライド マテリアルズ インコーポレイテッド 基板の両側から孔を形成する方法

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