JPS6393632U - - Google Patents

Info

Publication number

JPS6393632U

JPS6393632U JP18824186U JP18824186U JPS6393632U JP S6393632 U JPS6393632 U JP S6393632U JP 18824186 U JP18824186 U JP 18824186U JP 18824186 U JP18824186 U JP 18824186U JP S6393632 U JPS6393632 U JP S6393632U

Authority

JP

Japan

Prior art keywords

semiconductor manufacturing

quartz

chamber

reaction vessel

manufacturing device

Prior art date

1986-12-05

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 5
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
• 238000004519 manufacturing process Methods 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims description 4