JPS6393558A - Cutting device for hard and brittle material by electro-deposited diamond wire - Google Patents

Abstract

PURPOSE:To reciprocate a cutting wire at constant accuracy to reduce power consumption and to make a volume of a device smaller, by making an arrangement to directly reciprocate the cutting wire. CONSTITUTION:A number of cutting wires 21 are stretched between at least a pair of multi-groove pulleys 231-234 capable of making only rotation in such a manner that they can move in their lengthwise direction. There is provided a motion conversion mechanism for converting a circulating movement of a hollow pin chain 14 which circulatingly moves continuously in a given direction in parallel with the cutting wires 21 into a reciprocating motion in the lengthwise direction of the cutting wires 21. As a result, since the circulating movement of the hollow pin chain 14 directly reciprocates the cutting wires 21, a long stroke with small mass of a movable part can causes the cutting wires 21 to reciprocates at a constant high speed. With the arrangement, power consumption is small and a volume of a device can be made smaller.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a cutting device for cutting a workpiece using a Tiremond wire (a cutting wire electrodeposited with diamond abrasive grains), and in particular, the present invention relates to a cutting device that cuts a workpiece using a Tiremond wire (a cutting wire electrodeposited with diamond abrasive grains), and in particular, the present invention relates to a cutting device that cuts a workpiece using a Tiremond wire (a cutting wire electrodeposited with diamond abrasive grains). The present invention also relates to an improved cutting device that can drive a cutting wire at high speed and cut a workpiece with less power consumption.

[Background of the invention] In recent years, with the development of solid-state physics and biological research, the demand for hard and brittle materials such as silicon, compound semiconductors, and crystal has increased rapidly, especially in the electronics industry. As research on vine ceramics progresses, 5
Demand for hard and brittle materials tends to increase in quantity.

Therefore, there is a need for techniques for machining these hard and brittle materials with high precision and high efficiency, and development and research on such machining techniques is progressing.

Among the machining technologies for hard and brittle materials, research and development related to cutting can be roughly divided into methods using free abrasive grains, methods using free abrasive grains,
Progress has been made along two lines: the use of tools with fixed abrasive grains; and the use of tools with fixed abrasive grains.

Among cutting methods that use free abrasive grains, there are methods that use ultra-thin steel strips as tools (multi-blade saws) and methods that use wires (multi-wire saws).
Among the cutting methods that use abrasive tools, there is a method that uses a ring-shaped rotary blade with a blade on the inner periphery (inner peripheral blade) and a method that uses a disc-shaped rotary blade with a blade on the outer periphery (
A method using a peripheral blade) and a wire with abrasive grains is known.

The method of using free abrasive grains generally generates less heat in the workpiece, so it is possible to keep the process-affected layer small; however,
It has been found that this method is less efficient than the method using an abrasive rice grain tool, and is not suitable for cutting large workpieces.

However, the present inventor has developed a new type of multi-wire saw and multi-blade saw that use free abrasive grains, and has succeeded in pioneering new frontiers in cutting using free abrasive grains.

On the other hand, cutting methods that use tools with abrasive grains have better cutting efficiency than methods that use free abrasive grains, and in particular, methods that use wires with abrasive grains are suitable for cutting large workpieces. Development of large-sized cutting tools using abrasive wire is also underway.

FA, which was jointly developed by the California Institute of Technology and NASA, has recently been developed as a cutting device that uses abrasive wire.
ST device (Fired Abrasive Slick
ingTechnique) has been announced. This device reciprocates a frame body to which an abrasive wire is attached parallel to the longitudinal direction of the wire, and also attaches a workpiece to a workpiece mount that swings about an axis perpendicular to the wire. is attached to the workpiece, and the frame is reciprocated while giving the workpiece a swinging motion about the axis to cut the workpiece.

This FAST device is compatible with conventional wire saws using free abrasive grains that were known before the development of this device (for example, the French SA
It has a feature that it has much better cutting efficiency than the "E" type (manufactured by Company E), and is therefore suitable for cutting large workpieces. However, in this device, the frame is large and has a large mass, so it is not possible to reciprocate the abrasive wire at high speed, the device has a large volume, and has a large power consumption.

[Object of the Invention] An object of the present invention is to provide a cutting device with a novel structure that eliminates the drawbacks inherent in the FAST device.

[Summary of the Invention] In the cutting device according to the present invention, the cutting wire (wire with abrasive grains) is not stretched around a frame or the like, and is configured to reciprocate in the longitudinal direction. This has the advantage that the cutting wire can be reciprocated at a constant high speed over a longer stroke than the FAST device, and it consumes less power than the FAST device.

In the cutting device of the present invention, a large number of cutting wires are wound so as to move freely in the longitudinal direction between at least a pair of multi-groove pulleys that are provided so as to be rotatable. The cutting wire has an endless driving member that is arranged in parallel with the cutting wire and is always continuously cyclically moved in a fixed direction, and a movement that converts the continuous cyclical movement of the driving endless member into longitudinal reciprocating motion of the cutting wire. The present invention is characterized in that a conversion mechanism is provided as a connecting body between the endless member and the cutting wire. In the device of the present invention, the circular motion of the endless member directly reciprocates the cutting wire, so the size of the movable part that reciprocates together with the cutting wire is much smaller than in the FAST device, and therefore, The cutting wire can be reciprocated at a constant high speed with a longer stroke than the FAST system, and the power consumption can be reduced, and it is also possible to realize a cutting device that is quiet and has less vibration.

In one embodiment of the invention described below, the motion conversion mechanism is
A slider that is fixed to the cutting wire (diamond wire) and can move together with the wire, and a slider that is fixed to the endless member (hollow bin chain) and runs within the guide groove of the slider at right angles to the wire. a slider bin slidably engaged with the slider in the direction of the slider.

[Embodiments of the Invention] Examples of the present invention will be described below with reference to the drawings.

1 to 4 are schematic diagrams showing one embodiment of the cutting device of the present invention, and are a side view, a top view, a front view, and an external perspective view, respectively.

In the figure, 8 is a long base made of H-shaped steel.
On the base 8, support frames 1 to 5 are placed at required intervals.
are fixedly erected, and the support frames 1 and 2 are connected and fixed to each other by the top plate 6, and the support frames 3, 4 and 5 are connected to each other by the top plate 7, thereby forming a strong frame structure as a whole.

A shaft stopper member 9 is located at the center of the top plate 6, which is located 4d at the upper end of the support frame 2, and can be moved back and forth freely. is arranged, and the shaft stopper member 9
．． At the lower end of the shaft 10°, which is rotatably supported by is fixed. Similarly, a shaft stopper member 92 is arranged at the center of the top plate 7 at the upper end of the support frame 3, and a chain block 112 is installed at the lower end of the shaft 102 rotatably supported by the shaft stopper member 92, and at the upper end thereof. Timing pulleys 122 are each fixed.

A print motor 13 is fixedly disposed on the lower surface of the top plate 7 between the support frames 4 and 5, and a timing pulley 121 is fixed to the upper end of the motor shaft protruding from the upper surface of the top plate 7.

Said chain brocket 11. ．． A hollow pinch chain 14 is endlessly hooked and rotated between the timing pulley 12. ．． A timing belt 15 is looped between 12□. A slider pin 16 is provided to protrude downward from one location of the endlessly turned hollow pinch chain 14.

At the lower position of the traveling part of the pollau pinch chain 14, as shown in FIG.
Wooden guide shafts 20.20 are installed in parallel, and the slider 17 is slidably inserted into these guide shafts 20.20.

A guide groove 18 is provided on the upper surface of the slider 17 in a direction perpendicular to the running direction of the hollow pin chain 14, and the slider pin 16 is slidably engaged with this guide groove 18. Further, a wire mounting plate 19 is fixed to the lower surface of the slider 17 for tensioning a large number of diamond wires 21, 21, . . . in parallel at required intervals.

Multi-groove pulleys 231 and 23□ are installed on the support frame 1 at the top and bottom via brackets 221, and multi-groove pulleys 234.2 are installed on the support frame 4 at the top and bottom via brackets 222.
33 is installed. The diamond wire is, for example, a piano wire wire with a diameter of 0.1 to 0.3 mm, on which diamond abrasive copper or nickel with a grain size of 40 to 60 μm is electrodeposited; A large number of diamond wires 21 are each fixed at one end to the wire fixing mounting plate 19 on the lower surface of the slider 17, and the multi-groove pulleys 231.23
2. After turning the hooks around 233 and 234, the other ends are tightened and fixed using a tightening tool provided on the wire mounting plate 19, and the intervals between each diamond wire 21, 21... are cut by slicing. It is set according to the thickness of the hard and brittle material to be used.

Support frames 24.2 are spaced apart above the base 8 so that the lower blade running parts of the diamond wires 21.21... can pass through.
5 is fixed upright, and the upper ends of these support frames 24 and 25 are 2
It is rigidly connected by a wooden shaft 26.26.

Further, the shafts 26.26 are provided with brackets 27. at intervals in the running direction of the diamond wires 21.21. ．． 27□ is fixed, and each of these brackets 270 and 272 has a diamond wire 21
．． 21... The wire receiver with a cut groove on the fixed bit that receives the lower blade running part is a multi-groove pulley 28. ．． 28° has been taken.

In the wire receiver, a processing table swinging device 29 equipped with a processing table 30 is disposed in a downward direction between the multi-groove pulleys 281 and 282. As shown in FIG. 6, the processing table swinging device 29 includes a frame box 32 that swingably supports a swing shaft 31 integrated with the processing table 30, and the frame box 32 includes a reduction gear and a motor. 33, a link 34 for converting the rotation of the motor 33 into a swinging motion of the processing table 30. ．． 34. ,3
4. It is equipped with l. Furthermore, the processing table swinging device 29 is guided in the vertical direction by a cross roller way 35 (see FIG. 3), and a pulley 36 as shown in FIG.
, 382 are connected to a balance weight 38 by a twisted wire rope 37, and the machining pressure can be adjusted by adjusting the weight of the balance weight 38.

In the processing table 30, the wire receiver is a multi-groove pulley 2B,
, facing below the center position of 2B□, and the processing table 30
A workpiece M made of a hard and brittle material such as a silicon ingot is firmly attached and fixed on top. The silicon ingot usually has a cylindrical shape, so in order to prevent edge cracking during cutting, the outside of the silicon ingot is pounded with fine glass powder and adhesive to form a workpiece with a rectangular cross section as shown in the figure. It is formed of material M. Processing table 3
In order to swing 0, a four-bar rotational linkage shown diagrammatically in FIG. 7 may be used.

During the cutting process, a constant amount of working fluid such as light oil is constantly supplied to the cutting area of the workpiece M by the diamond wire 21 from a working fluid supply nozzle 39 in order to extend the life of the wire and improve processing efficiency. . In this case, in order to prevent the working fluid from scattering, the wire receiver is provided with a cover (not shown) around the multi-groove pulleys 2B, 28°, and a working fluid recovery device (not shown).

Next, the operation when cutting the workpiece M and the operation of each part of the cutting apparatus having the above-mentioned structure will be explained.

The print motor 13 is rotated by a timing belt 15 and a chain brocket 11. ．． 112 to the hollow pinch chain 14, which causes the hollow pinch chain 14 in FIG. 5 to run in one direction as shown by the arrow in the figure. The Cheno 1
The slider bin 16 attached to one location of the slider 17 engages with the guide groove 18 of the slider 17, so when the slider bin 16 is on the leftward traveling side, the slider 17 is carried along with the slider 17 and travels leftward. Similarly, when the vehicle is on the rightward traveling side, the slider 17 is taken along with it and is caused to travel rightward. On the slider 17, both ends of a large number of diamond wires 21, 21... are fixed to the wire mounting plate 19 fixed to the slider 17, so these diamond wires 21, 21... They reciprocate all at once in complete synchronization with the reciprocating movement of the slider 17.

In this case, as the motor 13 rotates in one direction, the hollow pinch 14 continuously travels in one direction as shown by the arrow in FIG.
When the slider bin 16 rotates around the chain sprocket tll+ or 112, the slider 17 changes its running direction and moves back and forth. The reciprocating speed of the slider 17, and therefore the reciprocating speed of the multiple diamond wires 21, 21... stretched at required pitch intervals, is adjusted using the rotation speed adjustment dial attached to the motor 13. Any speed can be selected depending on the material M, and a maximum wire speed of 330 m/min can be achieved.

The swinging motion of the processing table 30 by the processing table swinging device 29 is achieved by a link 34. directly connected to a motor 33. 60~600r,
By rotating it at p and m, the rotational motion of it is converted into reciprocating motion by the link 342, and @ integrated with the processing table 30 is
The information is transmitted to a link 343 directly connected to 31.

Thereby, link 34. swings in a circular arc in the direction of the arrow shown in FIG. This link 34. The workpiece M fixed on the processing table 30 swings in the running direction of the diamond wire 21 at a frequency of 1 to 10 Hz in accordance with the swinging movement.

The wire receiver is a force for pressing the workpiece M against a large number of diamond wires 21, 21... running between multi-groove pulleys 281, 282, that is, a machining load can be adjusted arbitrarily by adjusting the weight of the balance weight 38. However, depending on the workpiece M, the value can be 1.5 to 4.0 per wire. ON machining load can be selected.

In Fig. 8, which shows the state in which the cutting process of the workpiece M is in progress, the swing radius of the workpiece M...r The same Swing angle...0 The wire deflection angle...φ The same Deflection width...・△ Distance between wire receiving groove and pulley... 2A Contact length between workpiece and wire...℃, then △ θ snow 2φ= 2 jan-' (-) ・
...(2) From equations (1) and (2), the contact length between the workpiece and the wire is determined from equation (3). This contact length °C is shorter than the width W of the workpiece M in one direction of the wire. In other words, the workpiece M reduces the contact length of the workpiece during cutting, thereby increasing the processing pressure per wire contact length, resulting in an increase in processing efficiency. In addition, by rocking the workpiece in this way, it becomes easier to discharge the cutting chips along with the machining fluid, which not only increases machining efficiency but also increases the life of the wire due to the cooling effect of the machining fluid. Become.

[Effects of the Invention] As explained above, in the cutting device of the present invention, since the cutting wire is configured to directly reciprocate, the mass of the movable part that moves together with the cutting wire is equal to that of the known FAST. It is extremely small compared to the known FAST device, and therefore, compared to the known FAST device, the cutting wire can be reciprocated at a constant high speed except for the ends where the direction is changed, and it consumes far less power. Furthermore, the volume of the device can also be reduced.

That is, the present invention provides a cutting device that can drive the cutting wire at high speed, consumes less power, is smaller, and generates less vibration than the known FAST device.

It goes without saying that a motion conversion mechanism having the same function can be used in addition to the motion conversion mechanism using the slider and slider bin shown in the above embodiment. Also,
It is clear that as a biasing means for pressing the workpiece against the cutting wire, in addition to using a force such as a weight, a spring, or a pressurized fluid, computer-controlled biasing means can also be used. be.

[Brief explanation of the drawing]

Fig. 1 is a schematic side view of one embodiment of the cutting device of the present invention;
3 is a front view of the same, FIG. 4 is an external perspective view of the same, FIG. 5 is an explanatory diagram of the multi-wire traveling drive, and FIG. 6 is an external perspective view showing an example of the processing table swinging device. Figure 7 is an explanatory diagram of the four-cylinder rotation link mechanism used for swinging the processing table, Figure 8
The figure is an explanatory diagram of the contact length between the workpiece and the wire. 1 to 5... Support frame 6, 7... Top plate 8...
Base 9. ,9. ...shaft stopper member 10,
, 102... shaft 11, , 112... diens brocket 12), 12
2...Timing pulley 13...Print motor
14... Hollow pinch chain 15... Timing belt 16... Slider bin 17... Slider 18... Guide groove 19... Wire mounting plate 20... Guide shaft 21... Diamond wire 221 , 222...Bracket l-23,~234...
・Multi-groove pulley 24.25... Support frame 26...
Shafts 27, 27. ... Bracket 28,, 282 ... Wire receiver multi-groove pulley 29 ... Processing table swinging device 30 ... Processing table 31 ... Swing axis
32...Frame box 33...Motor 34□~343...Link 35...
Cross roller way 36, 362...Pulley 37...Wire rope 38...Balance weight 39...Machining fluid supply nozzle Fig. 8 Fig. 7

Claims (2)

[Claims] (1) A large number of cutting electrodeposited diamond wires wound around at least one pair of multi-groove pulleys spaced apart from each other and driven reciprocally in the longitudinal direction, and a driving sprocket arranged parallel to the cutting wires. an endless driving member that is wound around a driven sprocket and is always continuously circulated in a fixed direction by the driving sprocket; and converting the continuous unidirectional circular movement of the endless driving member into reciprocating motion of the cutting wire. a processing table that supports a workpiece; and a processing table that urges the processing table toward the cutting wire so as to press the workpiece against the cutting wire at a predetermined pressure. and a processing table swinging device for swinging the processing table about the axis so as to swing the workpiece about the axis perpendicular to the cutting wire. A device for cutting hard and brittle materials using electrodeposited diamond wire. (2) In claim 1, the motion conversion mechanism has a guide groove in a direction perpendicular to the cutting wire, and is attached to the cutting wire so as to move together with the cutting wire. A hard-brittle material made of electrodeposited diamond wire, comprising a slider and a slider pin that is fixed to the endless drive member, engages with the guide groove, and can slide within the guide groove. Material cutting equipment.