JPS639129U - - Google Patents

Info

Publication number
JPS639129U
JPS639129U JP10137786U JP10137786U JPS639129U JP S639129 U JPS639129 U JP S639129U JP 10137786 U JP10137786 U JP 10137786U JP 10137786 U JP10137786 U JP 10137786U JP S639129 U JPS639129 U JP S639129U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
resist
spinner head
center
coating apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10137786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10137786U priority Critical patent/JPS639129U/ja
Publication of JPS639129U publication Critical patent/JPS639129U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP10137786U 1986-07-03 1986-07-03 Pending JPS639129U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10137786U JPS639129U (US20090163788A1-20090625-C00002.png) 1986-07-03 1986-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10137786U JPS639129U (US20090163788A1-20090625-C00002.png) 1986-07-03 1986-07-03

Publications (1)

Publication Number Publication Date
JPS639129U true JPS639129U (US20090163788A1-20090625-C00002.png) 1988-01-21

Family

ID=30972054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10137786U Pending JPS639129U (US20090163788A1-20090625-C00002.png) 1986-07-03 1986-07-03

Country Status (1)

Country Link
JP (1) JPS639129U (US20090163788A1-20090625-C00002.png)

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