JPS6391155U - - Google Patents
Info
- Publication number
- JPS6391155U JPS6391155U JP18547186U JP18547186U JPS6391155U JP S6391155 U JPS6391155 U JP S6391155U JP 18547186 U JP18547186 U JP 18547186U JP 18547186 U JP18547186 U JP 18547186U JP S6391155 U JPS6391155 U JP S6391155U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- vacuum
- vacuum container
- ion implantation
- implantation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18547186U JPS6391155U (enExample) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18547186U JPS6391155U (enExample) | 1986-12-03 | 1986-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6391155U true JPS6391155U (enExample) | 1988-06-13 |
Family
ID=31134128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18547186U Pending JPS6391155U (enExample) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6391155U (enExample) |
-
1986
- 1986-12-03 JP JP18547186U patent/JPS6391155U/ja active Pending