JPS6390838U - - Google Patents
Info
- Publication number
- JPS6390838U JPS6390838U JP18634886U JP18634886U JPS6390838U JP S6390838 U JPS6390838 U JP S6390838U JP 18634886 U JP18634886 U JP 18634886U JP 18634886 U JP18634886 U JP 18634886U JP S6390838 U JPS6390838 U JP S6390838U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- recognition camera
- rotary stage
- cassettes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18634886U JPS6390838U (enExample) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18634886U JPS6390838U (enExample) | 1986-12-03 | 1986-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390838U true JPS6390838U (enExample) | 1988-06-13 |
Family
ID=31135822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18634886U Pending JPS6390838U (enExample) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390838U (enExample) |
-
1986
- 1986-12-03 JP JP18634886U patent/JPS6390838U/ja active Pending