JPS6390828U - - Google Patents

Info

Publication number
JPS6390828U
JPS6390828U JP18624886U JP18624886U JPS6390828U JP S6390828 U JPS6390828 U JP S6390828U JP 18624886 U JP18624886 U JP 18624886U JP 18624886 U JP18624886 U JP 18624886U JP S6390828 U JPS6390828 U JP S6390828U
Authority
JP
Japan
Prior art keywords
tube
furnace body
mounting base
disposed
boat mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18624886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18624886U priority Critical patent/JPS6390828U/ja
Publication of JPS6390828U publication Critical patent/JPS6390828U/ja
Pending legal-status Critical Current

Links

JP18624886U 1986-12-03 1986-12-03 Pending JPS6390828U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18624886U JPS6390828U (US20030199744A1-20031023-C00003.png) 1986-12-03 1986-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18624886U JPS6390828U (US20030199744A1-20031023-C00003.png) 1986-12-03 1986-12-03

Publications (1)

Publication Number Publication Date
JPS6390828U true JPS6390828U (US20030199744A1-20031023-C00003.png) 1988-06-13

Family

ID=31135631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18624886U Pending JPS6390828U (US20030199744A1-20031023-C00003.png) 1986-12-03 1986-12-03

Country Status (1)

Country Link
JP (1) JPS6390828U (US20030199744A1-20031023-C00003.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48103088A (US20030199744A1-20031023-C00003.png) * 1972-04-12 1973-12-24
JPS5571616A (en) * 1978-11-20 1980-05-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Vapor phase growing treatment method
JPS60140814A (ja) * 1983-12-28 1985-07-25 Fujitsu Ltd 半導体製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48103088A (US20030199744A1-20031023-C00003.png) * 1972-04-12 1973-12-24
JPS5571616A (en) * 1978-11-20 1980-05-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Vapor phase growing treatment method
JPS60140814A (ja) * 1983-12-28 1985-07-25 Fujitsu Ltd 半導体製造装置

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