JPS6389700U - - Google Patents
Info
- Publication number
- JPS6389700U JPS6389700U JP18373886U JP18373886U JPS6389700U JP S6389700 U JPS6389700 U JP S6389700U JP 18373886 U JP18373886 U JP 18373886U JP 18373886 U JP18373886 U JP 18373886U JP S6389700 U JPS6389700 U JP S6389700U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- insulating film
- sio
- elements
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Description
第１図は本考案の一実施例の混合絶縁膜の比誘
電率、絶縁破壊電界強度、及び性能指数と、Ｔａ
２Ｏ５の組成との関係線図、第２図は本考案の一
実施例の、薄膜ＥＬ素子の断面構造図、第３図は
第２図のＥＬ素子に於て、第２絶縁層８に本考案
の混合絶縁膜を用いた場合の素子特性とＴａ２Ｏ
５の組成との関係線図である。
５……透明電極、６……第１絶縁層、７……発
光層、９……背面電極。
Figure 1 shows the relative dielectric constant, dielectric breakdown field strength, and figure of merit of a mixed insulating film according to an embodiment of the present invention, and Ta
FIG . 2 is a cross-sectional structural diagram of a thin film EL device according to an embodiment of the present invention. FIG. Device characteristics and Ta 2 O when using the mixed insulating film of the present invention
5 is a relationship diagram with the composition of No. 5 . 5...Transparent electrode, 6...First insulating layer, 7...Light emitting layer, 9...Back electrode.
Claims (1)
れ、薄膜の手法により作製される絶縁膜で、Ｔａ
２Ｏ５と、ＳｉＯ２との混合組成から成ることを
特徴とする絶縁膜。 An insulating film manufactured by thin film techniques that is used in thin film EL elements or various thin film devices.
An insulating film comprising a mixed composition of 2 O 5 and SiO 2 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18373886U JPS6389700U (en) | 1986-12-01 | 1986-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18373886U JPS6389700U (en) | 1986-12-01 | 1986-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389700U true JPS6389700U (en) | 1988-06-10 |
Family
ID=31130754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18373886U Pending JPS6389700U (en) | 1986-12-01 | 1986-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389700U (en) |
-
1986
- 1986-12-01 JP JP18373886U patent/JPS6389700U/ja active Pending