JPS6389666U - - Google Patents
Info
- Publication number
- JPS6389666U JPS6389666U JP18601786U JP18601786U JPS6389666U JP S6389666 U JPS6389666 U JP S6389666U JP 18601786 U JP18601786 U JP 18601786U JP 18601786 U JP18601786 U JP 18601786U JP S6389666 U JPS6389666 U JP S6389666U
- Authority
- JP
- Japan
- Prior art keywords
- sample chamber
- cylinder
- pressure
- moving
- pressurizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
Description
第１図は本考案の一実施例を示す構成図、第２
図は走査型電子顕微鏡の構成概念を示す図である
。
１０……電子銃部、１１……エミツタ、１２…
…引出し電極、２０……鏡筒部本体、２１……集
束レンズ、２２……偏向器、２３……対物レンズ
、３０……試料室、３１……試料、３２……試料
台、３３……試料台移動機構、４０……電子銃部
移動機構、５０……光学顕微鏡移動機構、５１…
…光学顕微鏡、６１……空圧源、６２……圧力ス
イツチ、６３……５方口電磁弁、６４……２方口
電磁弁。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure is a diagram showing the structural concept of a scanning electron microscope. 10...Electron gun section, 11...Emitsuta, 12...
... Extraction electrode, 20 ... Lens barrel main body, 21 ... Focusing lens, 22 ... Deflector, 23 ... Objective lens, 30 ... Sample chamber, 31 ... Sample, 32 ... Sample stage, 33 ... Sample stage moving mechanism, 40... Electron gun section moving mechanism, 50... Optical microscope moving mechanism, 51...
...Optical microscope, 61...Pneumatic pressure source, 62...Pressure switch, 63...5-way solenoid valve, 64...2-way solenoid valve.
Claims (1)
と、該移動機構を駆動するシリンダと、圧力源か
らの流体を弁機構を介して前記シリンダに注入す
ることによりシリンダ内の圧力を加圧する加圧機
構とを具備し、 前記シリンダを加圧して物体を試料室中心から
外側に移動させた後、圧力源の圧力が所定圧以下
になつたことを検知した時点で前記弁機構を閉じ
るように構成したことを特徴とする試料室におけ
る安全機構。 (2) 前記物体は、光学顕微鏡であることを特徴
とする実用新案登録請求の範囲第１項記載の試料
室における安全機構。 (3) 前記流体は空気であることを特徴とする実
用新案登録請求の範囲第１項記載の試料室におけ
る安全機構。[Claims for Utility Model Registration] (1) A moving mechanism for moving an object provided in a sample chamber, a cylinder for driving the moving mechanism, and injecting fluid from a pressure source into the cylinder via a valve mechanism. and a pressurizing mechanism that pressurizes the pressure inside the cylinder by pressurizing the cylinder to move the object from the center of the sample chamber to the outside, and then detecting that the pressure of the pressure source has fallen below a predetermined pressure. A safety mechanism in a sample chamber, characterized in that the valve mechanism is configured to close at a certain point in time. (2) The safety mechanism in a sample chamber according to claim 1, wherein the object is an optical microscope. (3) The safety mechanism in a sample chamber according to claim 1, wherein the fluid is air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18601786U JPS6389666U (en) | 1986-12-01 | 1986-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18601786U JPS6389666U (en) | 1986-12-01 | 1986-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389666U true JPS6389666U (en) | 1988-06-10 |
Family
ID=31135190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18601786U Pending JPS6389666U (en) | 1986-12-01 | 1986-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389666U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51142343A (en) * | 1975-05-23 | 1976-12-07 | Hitachi Ltd | On-off device for optical microscope |
-
1986
- 1986-12-01 JP JP18601786U patent/JPS6389666U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51142343A (en) * | 1975-05-23 | 1976-12-07 | Hitachi Ltd | On-off device for optical microscope |
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