JPS6389245U - - Google Patents
Info
- Publication number
- JPS6389245U JPS6389245U JP1986184327U JP18432786U JPS6389245U JP S6389245 U JPS6389245 U JP S6389245U JP 1986184327 U JP1986184327 U JP 1986184327U JP 18432786 U JP18432786 U JP 18432786U JP S6389245 U JPS6389245 U JP S6389245U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- holding part
- support arm
- holding
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986184327U JPH0436116Y2 (ko) | 1986-11-29 | 1986-11-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986184327U JPH0436116Y2 (ko) | 1986-11-29 | 1986-11-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6389245U true JPS6389245U (ko) | 1988-06-10 |
JPH0436116Y2 JPH0436116Y2 (ko) | 1992-08-26 |
Family
ID=31131896
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986184327U Expired JPH0436116Y2 (ko) | 1986-11-29 | 1986-11-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0436116Y2 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03177215A (ja) * | 1989-12-01 | 1991-08-01 | Sharp Corp | 板状体の把持装置 |
-
1986
- 1986-11-29 JP JP1986184327U patent/JPH0436116Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03177215A (ja) * | 1989-12-01 | 1991-08-01 | Sharp Corp | 板状体の把持装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0436116Y2 (ko) | 1992-08-26 |