JPS6389245U

JPS6389245U -

Info

Publication number: JPS6389245U
Application number: JP1986184327U
Authority: JP
Priority date: 1986-11-29
Filing date: 1986-11-29
Publication date: 1988-06-10
Also published as: JPH0436116Y2

Description

[Brief explanation of the drawing]

第１図は本考案に係る基板保持具の一実施例を
示す正面図、第２図は平面図、第３図は右側面図
、第４図は第１図―線拡大断面図、第５図は
角度設定機構の他の実施例を示す要部断面図、第
６図および第７図はそれぞれ基板保持具の従来例
を示す正面図および一部破断正面図である。１４，１４′……基板、４０……基板保持具、
４１……把持部、４４……支軸、４５……中心孔
、４６……アーム保持用金具、４７……支持アー
ム、６１……第１の保持部、６２……基板保持用
溝、６５……回動アーム、６７……第２の保持部
、６８……基板保持用溝、７０……連結杆、７３
……ばね、７７……操作レバー。 Fig. 1 is a front view showing one embodiment of the substrate holder according to the present invention, Fig. 2 is a plan view, Fig. 3 is a right side view, Fig. 4 is an enlarged sectional view taken along the line of Fig. 1, and Fig. 5 The figure is a sectional view of a main part showing another embodiment of the angle setting mechanism, and FIGS. 6 and 7 are a front view and a partially cutaway front view, respectively, showing a conventional example of a substrate holder. 14, 14'...Substrate, 40...Substrate holder,
41...Gripping part, 44...Spindle, 45...Center hole, 46...Arm holding fitting, 47...Support arm, 61...First holding part, 62...Substrate holding groove, 65 ... Rotating arm, 67 ... Second holding part, 68 ... Board holding groove, 70 ... Connection rod, 73
...Spring, 77...Operation lever.

Claims

[Scope of utility model registration request]

A grip part having a support shaft perpendicular to the longitudinal direction at the tip thereof, a support arm rotatably disposed on the support shaft and whose length can be adjusted continuously or stepwise, and a support arm provided at one end of the support arm. a first holding part having a groove for holding a substrate on an inner surface; a rotating arm disposed at the other end of the support arm; and a groove for holding a substrate provided at one end of the rotating arm. a second holding part that holds the substrate together with the first holding part; a second holding part that is disposed substantially parallel to the support arm, one end of which is connected to the other end of the rotating arm, and the other end of which is connected to the support shaft; a connecting rod slidably inserted into the center hole of the
A substrate holder characterized by comprising: an operation lever that is movably and rotatably attached to the connecting rod, and a spring that imparts a rotational habit in a closing direction to the rotational arm.