JPS6389243U - - Google Patents
Info
- Publication number
- JPS6389243U JPS6389243U JP18472086U JP18472086U JPS6389243U JP S6389243 U JPS6389243 U JP S6389243U JP 18472086 U JP18472086 U JP 18472086U JP 18472086 U JP18472086 U JP 18472086U JP S6389243 U JPS6389243 U JP S6389243U
- Authority
- JP
- Japan
- Prior art keywords
- belt
- end station
- semiconductor substrate
- roll
- möbius
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18472086U JPS6389243U (sv) | 1986-11-29 | 1986-11-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18472086U JPS6389243U (sv) | 1986-11-29 | 1986-11-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6389243U true JPS6389243U (sv) | 1988-06-10 |
Family
ID=31132662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18472086U Pending JPS6389243U (sv) | 1986-11-29 | 1986-11-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6389243U (sv) |
-
1986
- 1986-11-29 JP JP18472086U patent/JPS6389243U/ja active Pending