JPS6388546A - Positive type photosensitive composition - Google Patents
Positive type photosensitive compositionInfo
- Publication number
- JPS6388546A JPS6388546A JP23476886A JP23476886A JPS6388546A JP S6388546 A JPS6388546 A JP S6388546A JP 23476886 A JP23476886 A JP 23476886A JP 23476886 A JP23476886 A JP 23476886A JP S6388546 A JPS6388546 A JP S6388546A
- Authority
- JP
- Japan
- Prior art keywords
- sensitivity
- cresol
- titled composition
- acid
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 28
- 229920005989 resin Polymers 0.000 claims abstract description 32
- 239000011347 resin Substances 0.000 claims abstract description 32
- 229920003986 novolac Polymers 0.000 claims abstract description 18
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 claims abstract 6
- WOAHJDHKFWSLKE-UHFFFAOYSA-N 1,2-benzoquinone Chemical compound O=C1C=CC=CC1=O WOAHJDHKFWSLKE-UHFFFAOYSA-N 0.000 claims abstract 3
- 150000001875 compounds Chemical class 0.000 claims description 9
- 230000035945 sensitivity Effects 0.000 abstract description 23
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 abstract description 12
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 abstract description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 abstract description 6
- 239000003513 alkali Substances 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 6
- 239000000243 solution Substances 0.000 abstract description 5
- 229930040373 Paraformaldehyde Natural products 0.000 abstract description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 abstract description 2
- 239000012895 dilution Substances 0.000 abstract description 2
- 238000010790 dilution Methods 0.000 abstract description 2
- 229920002866 paraformaldehyde Polymers 0.000 abstract description 2
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 abstract 2
- 210000004940 nucleus Anatomy 0.000 abstract 1
- 230000002194 synthesizing effect Effects 0.000 abstract 1
- 239000002253 acid Substances 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- 239000007864 aqueous solution Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 5
- 239000000975 dye Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000004115 Sodium Silicate Substances 0.000 description 4
- 150000001299 aldehydes Chemical class 0.000 description 4
- 229930003836 cresol Natural products 0.000 description 4
- -1 cyclic acid anhydride Chemical class 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 4
- 229910052911 sodium silicate Inorganic materials 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 3
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000003377 acid catalyst Substances 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 229940116349 dibasic ammonium phosphate Drugs 0.000 description 2
- ZPWVASYFFYYZEW-UHFFFAOYSA-L dipotassium hydrogen phosphate Chemical compound [K+].[K+].OP([O-])([O-])=O ZPWVASYFFYYZEW-UHFFFAOYSA-L 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- VOOLKNUJNPZAHE-UHFFFAOYSA-N formaldehyde;2-methylphenol Chemical compound O=C.CC1=CC=CC=C1O VOOLKNUJNPZAHE-UHFFFAOYSA-N 0.000 description 2
- LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 2
- 230000005660 hydrophilic surface Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001507 metal halide Inorganic materials 0.000 description 2
- 150000005309 metal halides Chemical class 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 150000007522 mineralic acids Chemical class 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 150000007524 organic acids Chemical class 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- VEUMBMHMMCOFAG-UHFFFAOYSA-N 2,3-dihydrooxadiazole Chemical compound N1NC=CO1 VEUMBMHMMCOFAG-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- ZRUOTKQBVMWMDK-UHFFFAOYSA-N 2-hydroxy-6-methylbenzaldehyde Chemical compound CC1=CC=CC(O)=C1C=O ZRUOTKQBVMWMDK-UHFFFAOYSA-N 0.000 description 1
- LBBOQIHGWMYDPM-UHFFFAOYSA-N 2-tert-butylphenol;formaldehyde Chemical compound O=C.CC(C)(C)C1=CC=CC=C1O LBBOQIHGWMYDPM-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- LBSXSAXOLABXMF-UHFFFAOYSA-N 4-Vinylaniline Chemical compound NC1=CC=C(C=C)C=C1 LBSXSAXOLABXMF-UHFFFAOYSA-N 0.000 description 1
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 description 1
- QHPQWRBYOIRBIT-UHFFFAOYSA-N 4-tert-butylphenol Chemical compound CC(C)(C)C1=CC=C(O)C=C1 QHPQWRBYOIRBIT-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical group [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 239000004111 Potassium silicate Substances 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- UIIMBOGNXHQVGW-DEQYMQKBSA-M Sodium bicarbonate-14C Chemical compound [Na+].O[14C]([O-])=O UIIMBOGNXHQVGW-DEQYMQKBSA-M 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052910 alkali metal silicate Inorganic materials 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 238000007743 anodising Methods 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- 239000000981 basic dye Substances 0.000 description 1
- HRBFQSUTUDRTSV-UHFFFAOYSA-N benzene-1,2,3-triol;propan-2-one Chemical compound CC(C)=O.OC1=CC=CC(O)=C1O HRBFQSUTUDRTSV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 150000001896 cresols Chemical group 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- ZXJXZNDDNMQXFV-UHFFFAOYSA-M crystal violet Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1[C+](C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 ZXJXZNDDNMQXFV-UHFFFAOYSA-M 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 1
- 229940111685 dibasic potassium phosphate Drugs 0.000 description 1
- 229940061607 dibasic sodium phosphate Drugs 0.000 description 1
- BJZIJOLEWHWTJO-UHFFFAOYSA-H dipotassium;hexafluorozirconium(2-) Chemical compound [F-].[F-].[F-].[F-].[F-].[F-].[K+].[K+].[Zr+4] BJZIJOLEWHWTJO-UHFFFAOYSA-H 0.000 description 1
- BNIILDVGGAEEIG-UHFFFAOYSA-L disodium hydrogen phosphate Chemical compound [Na+].[Na+].OP([O-])([O-])=O BNIILDVGGAEEIG-UHFFFAOYSA-L 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000004494 ethyl ester group Chemical group 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- MCPSMQGVSYDFLC-UHFFFAOYSA-N formaldehyde;2-octylphenol Chemical compound O=C.CCCCCCCCC1=CC=CC=C1O MCPSMQGVSYDFLC-UHFFFAOYSA-N 0.000 description 1
- USEUJPGSYMRJHM-UHFFFAOYSA-N formaldehyde;4-methylphenol Chemical compound O=C.CC1=CC=C(O)C=C1 USEUJPGSYMRJHM-UHFFFAOYSA-N 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 229940074391 gallic acid Drugs 0.000 description 1
- 235000004515 gallic acid Nutrition 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229940107698 malachite green Drugs 0.000 description 1
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229920003145 methacrylic acid copolymer Polymers 0.000 description 1
- 229940117841 methacrylic acid copolymer Drugs 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- IWVKTOUOPHGZRX-UHFFFAOYSA-N methyl 2-methylprop-2-enoate;2-methylprop-2-enoic acid Chemical compound CC(=C)C(O)=O.COC(=O)C(C)=C IWVKTOUOPHGZRX-UHFFFAOYSA-N 0.000 description 1
- CXKWCBBOMKCUKX-UHFFFAOYSA-M methylene blue Chemical compound [Cl-].C1=CC(N(C)C)=CC2=[S+]C3=CC(N(C)C)=CC=C3N=C21 CXKWCBBOMKCUKX-UHFFFAOYSA-M 0.000 description 1
- 229960000907 methylthioninium chloride Drugs 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- NNHHDJVEYQHLHG-UHFFFAOYSA-N potassium silicate Chemical compound [K+].[K+].[O-][Si]([O-])=O NNHHDJVEYQHLHG-UHFFFAOYSA-N 0.000 description 1
- 229910052913 potassium silicate Inorganic materials 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- 229940043267 rhodamine b Drugs 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 210000002966 serum Anatomy 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 150000003459 sulfonic acid esters Chemical class 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- ROVRRJSRRSGUOL-UHFFFAOYSA-N victoria blue bo Chemical compound [Cl-].C12=CC=CC=C2C(NCC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 ROVRRJSRRSGUOL-UHFFFAOYSA-N 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
- G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の分野〕
本発明は、ポジ型感光性組成物に関するものであり、更
にくわしくは、高感度で現像ラチチユードの広いポジ型
感光性組成物に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to a positive-working photosensitive composition, and more particularly to a positive-working photosensitive composition having high sensitivity and a wide development latitude.
0−キノンジアジド化合物を含有してなる感光性組成物
は、非常にすぐれたポジ型感光性組成物として平版印刷
版の製造や、フォトレジストとして工業的に用いられて
きた。この組成物の感度を高める方法について、種々の
提案がなされてきたが満足すべきものが1尋られていな
い。例えば○−キノンジアジド化合物の量を少くとする
と、感度は上昇するが、現像ラチチュードが狭くなると
いう欠点が生じる。現像過多のときに、未露光部が溶解
し、感度が著しく上ったり耐剛性を低下させるという欠
点がある。特開昭52−80022号に記載されている
環式酸無水物の添加は感度を上げ、比較的現像ラチチユ
ードの低下が少いが、十分に感度を上げるために添加量
を増すと、現像うチチュードが低下してしまうという欠
点がある。Photosensitive compositions containing 0-quinonediazide compounds have been used industrially as excellent positive-working photosensitive compositions in the production of lithographic printing plates and as photoresists. Various proposals have been made regarding methods of increasing the sensitivity of this composition, but none have been found to be satisfactory. For example, if the amount of the O-quinonediazide compound is reduced, the sensitivity will increase, but there will be a drawback that the development latitude will become narrower. When over-developed, unexposed areas dissolve, resulting in a significant increase in sensitivity and a decrease in rigidity. The addition of a cyclic acid anhydride described in JP-A No. 52-80022 increases sensitivity and causes a relatively small decrease in development latitude, but if the amount added is increased to sufficiently increase sensitivity, development The disadvantage is that the attitude is reduced.
特開昭57−118237号に記載されている没食子酸
等も同様の欠点を有している。Gallic acid and the like described in JP-A-57-118237 also have similar drawbacks.
従って、本発明の目的は、高感度で、現像ラチチュード
の広い、0−キノンジアジド化合物とアルカリ可溶性ノ
ボラック樹脂からなるポジ型感光性組成物を提供するこ
とである。Therefore, an object of the present invention is to provide a positive-working photosensitive composition comprising an 0-quinonediazide compound and an alkali-soluble novolac resin, which has high sensitivity and a wide development latitude.
〔発明の構成コ
本発明者等は、挿々検討を重ねた結果、特定の7ボラブ
ク樹脂を適量使用することにより、上記目的が達成され
ることを見出した。即ち、本発明は0−キノンジアジド
化合物とアルカリ可溶性ノボラック樹脂とかろなるポジ
量感光性II′脂組成物において、当該ノボラック樹脂
の5〜40重量%が6核体以下が75重量%以上の0−
クレゾール樹脂であることを特徴とするポジ型感光性組
成物である。[Structure of the Invention] As a result of repeated studies, the present inventors have found that the above object can be achieved by using an appropriate amount of a specific 7-borabuku resin. That is, the present invention provides a positive weight photosensitive II' resin composition comprising an 0-quinone diazide compound and an alkali-soluble novolac resin, in which 5 to 40% by weight of the novolac resin contains 0-
This is a positive photosensitive composition characterized by being a cresol resin.
従来より使用されているポジ型感光性組成物におけるア
ルカリ可溶性ノボラック樹脂は1核体から15核体程度
までを包含している平均核体数は5〜lO程度であるが
、本発明者らは7核体以上が少い、即ち、6核体以Fが
75重量%以上の0−クレゾールヒを脂を適量使用する
ことで、高感度で現像ラチチュードの広い感光性組成物
が得られることを見出した。Alkali-soluble novolak resins in conventionally used positive-working photosensitive compositions have an average number of nuclei of about 5 to 10, including from 1 to 15 nuclei, but the present inventors It has been found that a photosensitive composition with high sensitivity and a wide development latitude can be obtained by using an appropriate amount of 0-cresol containing a small amount of 7-nuclear atoms or more, that is, 75% by weight or more of 6-nuclear atoms or more. Ta.
7核体以上の0−クレゾール樹脂が全o−りし・ゾール
樹脂に対して25重量%を越えると、感度上昇効果が少
い。又、6核体以下が75重量%以上の0−クレゾール
樹脂であっても、その使用量がアルカリ可溶性ノボラッ
ク樹脂の5重量以下であると感度上昇効果が少なく、−
力40重量%以上であると、クリーナーや、ブランケッ
ト洗浄剤のような、有機溶剤や酸を含む薬品に対する耐
性が減少する。If the content of the O-cresol resin having 7 or more nuclear bodies exceeds 25% by weight based on the total O-cresol resin, the effect of increasing sensitivity will be small. Furthermore, even if the 0-cresol resin contains 75% by weight or more of 6-nuclear bodies or less, if the amount used is 5% by weight or less of the alkali-soluble novolac resin, the effect of increasing sensitivity will be small, and -
If the strength is 40% by weight or more, the resistance to chemicals containing organic solvents and acids, such as cleaners and blanket cleaning agents, decreases.
各、核体の重量比は、GPCで得られたチャートの各ピ
ーク血清の隣分を切り抜き重量法によって計算したく日
本化学会誌、1972年、Nα4、p801参照)。G
PCの測定は下記の条件で行ったものである。The weight ratio of each nuclear body is calculated by cutting out the adjacent portion of each peak serum in the chart obtained by GPC and using the weight method (see Journal of the Chemical Society of Japan, 1972, Nα4, p801). G
The PC measurements were conducted under the following conditions.
装置:東洋曹達工業■(ハイスピード液体クロマトグラ
フHLC−802UR)
カラム:G4000H,+G2000)1g溶 媒:萎
留テトラヒドロフラン
流 速+ 1.5 me /m1n6核体以下が
75重!%以上の0−クレゾール/ボラック樹脂を調製
するには、常法に従って〇−クレゾールを酸性触媒の存
在下でアルデヒド類と縮合すればよいが、好ましくは0
〜クレゾールとアルデヒド類をアルカリ存在下で反応さ
せて得られる0−クレゾール2核体のジメチロール化合
物(以下ジメチロール化合物と称する)を酸性触媒存在
下でQ−クレゾールと反応させることにより好適に調製
することができる。Equipment: Toyo Soda Kogyo ■ (High Speed Liquid Chromatograph HLC-802UR) Column: G4000H, +G2000) 1g Solvent: Diluted tetrahydrofuran Flow rate + 1.5 me/m 1n6 nuclear bodies and below are 75 times heavier! % or more of 0-cresol/borac resin, 0-cresol may be condensed with aldehydes in the presence of an acidic catalyst according to a conventional method, but preferably
~ Suitably prepared by reacting an 0-cresol dinuclear dimethylol compound (hereinafter referred to as a dimethylol compound) obtained by reacting cresol and aldehydes in the presence of an alkali with Q-cresol in the presence of an acidic catalyst. Can be done.
上記ジメチロール化合物を調製するためのアルデヒド類
の具体例としてはホルムアルデヒド、バラホルムアルデ
ヒド等をあげることができる。使用するアルカリとして
は特に限定されないが、水酸化ナトリウム、水酸化カリ
ウムが好ましい。アルデヒド類の使用量は0−クレゾー
ル1モルに対して1.5〜3モルが好ましく、アルカリ
の使用量は好ましくは0.1〜1.2モルの範囲である
。反応温度は特に限定されないが30〜90℃が好まし
ジメチロール化合物から0−タレゾールノボラックを調
製するために使用する酸触媒としては例えば塩酸、硫酸
等の無機酸、蟻酸、酢酸、シコウ酸、p )ルエンス
ルホン酸等の有機酸を使用できる。Specific examples of aldehydes for preparing the dimethylol compound include formaldehyde, paraformaldehyde, and the like. The alkali to be used is not particularly limited, but sodium hydroxide and potassium hydroxide are preferred. The amount of aldehyde used is preferably 1.5 to 3 mol per 1 mol of 0-cresol, and the amount of alkali used is preferably 0.1 to 1.2 mol. The reaction temperature is not particularly limited, but is preferably 30 to 90°C. Examples of acid catalysts used to prepare 0-talesol novolak from dimethylol compounds include inorganic acids such as hydrochloric acid and sulfuric acid, formic acid, acetic acid, sychoic acid, p. ) Organic acids such as luenesulfonic acid can be used.
酸触媒の使用量は、ジメチロール化合物に対し0.1〜
10重量%が好ましい。0−クレゾールの1吏用量はジ
メチロール化合物1モルに対して2〜15モルの範囲が
好ましい、、反応温度は40〜12[1℃が好ましい。The amount of acid catalyst used is 0.1 to 0.1 to dimethylol compound.
10% by weight is preferred. The amount of 0-cresol per mol is preferably in the range of 2 to 15 mol per mol of the dimethylol compound, and the reaction temperature is preferably 40 to 12[deg.]C.
本発明の組成物に用いられる他のアルカリ可溶性ノボラ
ック樹脂は、通常のm、p−クレゾール−ホルムアルデ
ヒド樹脂、m−クレゾールホルムアルデヒド樹脂、フェ
ノール−ホルムアルデヒド樹脂、”+ p−クレゾール
−フェノール−ホルムアルデヒド樹脂等である。これら
は通常15核体位のものであり、7核体以上が40重量
%をこえるものである。Other alkali-soluble novolak resins used in the compositions of the present invention include conventional m,p-cresol-formaldehyde resins, m-cresol-formaldehyde resins, phenol-formaldehyde resins, p-cresol-phenol-formaldehyde resins, etc. These usually have 15 nuclei, and the proportion of 7 or more nuclei exceeds 40% by weight.
本発明の組成物には、上記のアルカリ可溶性ノボラック
樹脂以外の、アルカリ可溶性樹脂を必要に応じて配合す
ることができる。例えば、スチレン−アクリル酸共重合
体、メチルメタアクリレート−メタクリル酸共重合体、
アルカリ可溶性ポリウレタン樹脂、アルカリ可溶性ポリ
ブチラール樹脂等をあげることができる。このようなア
ルカリ可溶性樹脂は、アルカリ可溶性ノボラック樹脂に
対して100重量%まで、好ましくは50重量%まで添
加することができる。 。The composition of the present invention may contain alkali-soluble resins other than the above-mentioned alkali-soluble novolak resins, if necessary. For example, styrene-acrylic acid copolymer, methyl methacrylate-methacrylic acid copolymer,
Examples include alkali-soluble polyurethane resin and alkali-soluble polybutyral resin. Such alkali-soluble resin can be added up to 100% by weight, preferably up to 50% by weight, based on the alkali-soluble novolac resin. .
本発明に使用される特に好ましい0−キノンジアジド化
合物は0−ナフトキノンジアジド化合物であり、例えば
米国特許第3.046.110号、同第3、046.1
11号、同第3.046.121号、同第3.046.
115号、同第3.046.118号、同第3. (1
46,139号、同第3、046.120号、同第3.
046.121号、同第3.046.122号、同第3
.046.123号、同第3.061.430号、同第
3、102.809号、同第3.106.465号、同
第3.635.709号、同第、3.647.443号
の各明細書をはじめ、多数の刊行物に記されており、こ
れらは好適に使用することができる。これらの内でも、
特に芳香族ヒドロキシ化合物の0−ナフトキノンジアジ
ドスルホン酸エステルまたは0−ナフトキノンジアジド
カルボン酸エステル、および芳香族アミノ化合物のO−
ナフトキノンジアジドスルホン酸アミドまたはO−ナフ
トキノンジアジドカルボン酸アミドが好まし、特に米国
特許第3.635.709号明細書に記されているピロ
ガロールとアセトンとの縮合物にO−ナフトキノンジア
ジドスルホン酸をエステル反応させたもの、米国特許第
4.028.111号明細書に記されている末端にヒド
ロキシ基を有するポリエステルに0−ナフトキノンジア
ジドスルホン酸、または0−ナフトキノンジアジドカル
ボン酸をエステル反応させたもの、米国特許第4.13
9.384号明細書に記されているようなp−ヒドロキ
シスチレンのホモポリマーまたはこれと他の共重合し得
るモノマーとの共重合体に0−ナフトキノンジアジドス
ルホン酸またはQ−ナフトキノンジアジドカルボン酸を
エステル反応させたもの、米国特許第3.759.71
1号明細書に記されているようなp−アミノスチレンと
他の共重合しうるモノマーとの共重合体に0−ナフトキ
ノンジアジドスルホン酸または0−ナフトキノンジアジ
ドカルボン酸をアミド反応させたものは非常にすぐれて
いる。Particularly preferred 0-quinonediazide compounds for use in the present invention are 0-naphthoquinonediazide compounds, such as U.S. Pat.
No. 11, No. 3.046.121, No. 3.046.
No. 115, No. 3.046.118, No. 3. (1
No. 46,139, No. 3, No. 046.120, No. 3.
No. 046.121, No. 3.046.122, No. 3
.. 046.123, 3.061.430, 3.102.809, 3.106.465, 3.635.709, 3.647.443 It is described in numerous publications including the specifications of , and these can be suitably used. Among these,
In particular, 0-naphthoquinonediazide sulfonic acid esters or 0-naphthoquinonediazidecarboxylic acid esters of aromatic hydroxy compounds, and O-
Naphthoquinonediazide sulfonic acid amide or O-naphthoquinonediazidecarboxylic acid amide is preferred, especially the ester of O-naphthoquinonediazide sulfonic acid to the condensate of pyrogallol and acetone as described in U.S. Pat. No. 3,635,709. A product obtained by subjecting a polyester having a hydroxy group at the end to an ester reaction with 0-naphthoquinonediazide sulfonic acid or 0-naphthoquinonediazidecarboxylic acid as described in U.S. Patent No. 4.028.111, U.S. Patent No. 4.13
0-naphthoquinonediazide sulfonic acid or Q-naphthoquinonediazidecarboxylic acid is added to a homopolymer of p-hydroxystyrene or a copolymer thereof with other copolymerizable monomers as described in No. 9.384. Ester-reacted product, U.S. Patent No. 3.759.71
A copolymer of p-aminostyrene and other copolymerizable monomers as described in Specification No. 1 is subjected to an amide reaction with 0-naphthoquinonediazide sulfonic acid or 0-naphthoquinonediazidecarboxylic acid. Excellent.
更に米国特許第4.123.279号明細書に記されて
いる様に、上記のようなフェノール樹脂と共に、t−ブ
チルフェノールホルムアルデヒド樹R’tt、n−オク
チルフェノールホルムアルデヒド樹脂のような炭素数3
〜8のアルキル基で置換されたフェノールまたはクレゾ
ールとホルムアルデヒドとの縮合物とを併用することも
ある。0−キノンジアジド化合物対アルカリ可溶性樹脂
の混合比率は、重量比で50:50〜15:85が適当
であり、より好ましくは40:60〜20:80の範囲
である。Further, as described in U.S. Pat. No. 4,123,279, in addition to the above-mentioned phenolic resins, t-butylphenol formaldehyde resins R'tt, n-octylphenol formaldehyde resins having 3 carbon atoms, etc.
A condensate of phenol or cresol substituted with an alkyl group of 8 to 8 and formaldehyde may be used in combination. The mixing ratio of the 0-quinonediazide compound to the alkali-soluble resin is suitably in the range of 50:50 to 15:85 by weight, more preferably in the range of 40:60 to 20:80.
本発明によるポジ型感光性組成物には必要に応じて、更
に他の染料や顔料、可塑剤などを含有させることができ
る。好適な他の染料としては油溶性染料および塩基性染
料がある。具体的には、オイルイエロー#101オイル
イエロー#130、オイルピンク#312、オイルグリ
ーンBG、オイルブルーBO3,オイルブルー#603
、オイルブラックBY、オイルブラックBS、オイルブ
ラックT−505(以上、オリエント化学工業株式会社
製)、クリスタルバイオレット(C142555)、メ
チルバイオレット(CI 42535)、ローダミンB
(CI45170B>、マラカイトグリーン(CI42
000)、メチレンブルー(CI52015)などをあ
げることができる。The positive photosensitive composition according to the present invention may further contain other dyes, pigments, plasticizers, etc., if necessary. Other suitable dyes include oil-soluble dyes and basic dyes. Specifically, oil yellow #101 oil yellow #130, oil pink #312, oil green BG, oil blue BO3, oil blue #603
, Oil Black BY, Oil Black BS, Oil Black T-505 (manufactured by Orient Chemical Industry Co., Ltd.), Crystal Violet (C142555), Methyl Violet (CI 42535), Rhodamine B
(CI45170B>, malachite green (CI42
000), methylene blue (CI52015), etc.
このような染料は、本発明によるポジ型感光性組成物の
総重量に対して1重量%以下の範囲で含をさせることが
できる。Such dyes can be contained in an amount of 1% by weight or less based on the total weight of the positive photosensitive composition according to the present invention.
本発明によるポジ型感光性組成物は、上記各成分を溶解
する溶媒に溶かして所望の支持体上に塗布される。ここ
で使用する溶媒としては、エチレンジクロライド、シク
ロヘキサノン、メチルエチルケトン、エチレングリコー
ルモノメチルエーテル、エチレングリコールモノエチル
エーテル、2−、メトキシエチルアセテート、トルエン
、醇酸エチル、プロピレングリコールモノメチルエーテ
ルアセテート、プロピレングリコールメチルエーテルな
どがあり、これるの溶媒を単独あるいは混合して使用す
る。そして上記成分中の濃度(固形分)は、2〜50重
量?6である。また、塗布量は用途により異なるが、例
えば感光性平版印刷版についていえば一般的に固形分と
して045〜7 g / m’が適当であり、より好ま
しくは1,5〜3 g / m’の範囲である。The positive photosensitive composition according to the present invention is coated on a desired support after being dissolved in a solvent that dissolves each of the above components. Solvents used here include ethylene dichloride, cyclohexanone, methyl ethyl ketone, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-, methoxyethyl acetate, toluene, ethyl ester, propylene glycol monomethyl ether acetate, propylene glycol methyl ether, etc. These solvents can be used alone or in combination. And the concentration (solid content) in the above ingredients is 2 to 50% by weight? It is 6. The coating amount varies depending on the application, but for example, for photosensitive planographic printing plates, a solid content of 0.45 to 7 g/m' is generally appropriate, and more preferably a solid content of 1.5 to 3 g/m'. range.
本発明によるポジ型感光性組成物には、露光後の可視的
コントラストをよくするこために、上述のような染料の
色参目を変化させる酸を光によって発生するような化合
物、例えば米国特許第3.969.118号明細書に記
入されているような0−ナフトキノンジアジド−4−ス
ルホニルクロライド、米国特許第4.212.970号
明細書に記載されているような2−スチリル−5−トリ
ハロメチル−1,3,4オキザゾール、米国特許第3.
987.037号明細書に記載されているようなビニー
ルトリハロメチル−S−トリアジン化合物等を添加する
ことが好ましい。In order to improve the visual contrast after exposure, the positive-working photosensitive composition according to the present invention may contain a compound that generates an acid that changes the color scale of the dye when exposed to light, such as the one described in the US patent. 0-naphthoquinonediazide-4-sulfonyl chloride as described in U.S. Pat. No. 3.969.118, 2-styryl-5- as described in U.S. Pat. Trihalomethyl-1,3,4 oxazole, U.S. Patent No. 3.
It is preferable to add vinyltrihalomethyl-S-triazine compounds such as those described in No. 987.037.
又、塗布面質を向上させるために、フッ素系界面活性剤
などを含有させることが好ましい。Further, in order to improve the coating surface quality, it is preferable to contain a fluorine-based surfactant or the like.
さらに他の添加物として、米国特許第4.115.12
8号に記載されている環式酸無水物などを少量添加して
もよい。ポジ型感光性組成物を平版印刷版に適用する場
合には、支持体の上に感光液が塗布される。Still other additives include U.S. Patent No. 4.115.12
A small amount of a cyclic acid anhydride described in No. 8 may be added. When applying a positive-working photosensitive composition to a lithographic printing plate, a photosensitive liquid is applied onto a support.
かかるポジ型28版の支持体としては親水性表面ををす
るものならば使用でき、従来より平版印刷版の支持体と
して使用可能な種々のものが含まれるが、特に好ましい
ものはアルミニウム板である。好適なアルミニウム板に
は、純アルミニウム板およびアルミニウム合金板が含ま
れ、更にアルミニウムがラミネートもしくは蒸着された
プラスチックフィルムも含まれる。アルミニウム板の表
面は砂目立て処理、珪酸ソーダ、弗化ジルコニウム酸カ
リウム、燐酸塩等の水溶液への浸漬処理、あるいは陽極
酸化処理などの表面処理がなされていることが好ましい
。また、砂目立てしたのちに、米国特許第2.714.
066号明細書に記載されている如く珪酸す) IJウ
ム水溶液に浸漬処理されたアルミニウム板、米国特許第
3. tgt、 461号に記載されているようにアル
ミニウム板を陽極酸化処理したのちに、アルカリ金属珪
酸塩の水溶液に浸漬処理したちのミ米圓特許第4.15
3.461号に記載されているようなアルミニウム板を
陽極酸化したのち、ポリビニルホスホン酸の水溶液に浸
漬処理したものも好適に使用される。上記陽極酸化処理
は、例えば、燐酸、クロム酸、硫酸、硼酸等の無機酸、
若しくは、蓚酸、スルファミン酸等の有機酸またはこれ
ろの塩の水溶液又は非水溶液の単独又は二I以上を組み
合わせた電解液中でアルミニウム板に電流を流すことに
より実施される。As a support for such a positive-working 28 plate, any material having a hydrophilic surface can be used, and various materials conventionally usable as supports for lithographic printing plates are included, but an aluminum plate is particularly preferred. . Suitable aluminum plates include pure aluminum plates and aluminum alloy plates, as well as plastic films laminated or vapor-deposited with aluminum. The surface of the aluminum plate is preferably subjected to a surface treatment such as graining treatment, immersion treatment in an aqueous solution of sodium silicate, potassium fluorozirconate, phosphate, or the like, or anodization treatment. Also, after graining, US Patent No. 2.714.
Aluminum plate immersed in an aqueous IJ solution as described in U.S. Pat. As described in TGT, No. 461, an aluminum plate is anodized and then immersed in an aqueous solution of an alkali metal silicate.
3.461, which is anodized and then immersed in an aqueous solution of polyvinylphosphonic acid, is also preferably used. The above anodizing treatment may be performed using an inorganic acid such as phosphoric acid, chromic acid, sulfuric acid, or boric acid.
Alternatively, the method may be carried out by passing an electric current through an aluminum plate in an electrolytic solution of an organic acid such as oxalic acid or sulfamic acid or a salt thereof or a non-aqueous solution thereof alone or in combination of two or more.
また、米国特許第3.658.662号明細書に記載さ
れているようなシリケート電着も有効である。Also effective is silicate electrodeposition as described in US Pat. No. 3,658,662.
更には米国特許第4.087.34.1号胡細書、特公
昭46−27481号公報、特開昭52−30503号
公報に開示されているような電解グレインを施した支持
体を上記のように陽極酸化処理したものも有用である。Further, a support coated with electrolytic grains as disclosed in U.S. Pat. Also useful are those that have been anodized.
更に、米国特許第3.834.998号明細書に記され
ているような砂目立てしたのちに化学的にエツチングし
、しかるのちに陽極酸化処理したアルミニウム板も好ま
しい。Also preferred are grained, chemically etched, and then anodized aluminum plates as described in U.S. Pat. No. 3,834,998.
本発明によるポジ型28版は、従来と同様に透明原画を
通してカーボンアーク灯、水銀灯、メタルハライドラン
プ、キセノンランプなどの活性光線の豊富な光源により
音光されたのち、現像液で現像すると、感光層の露光さ
れた領域が除去されてその下の支持体の親水性表面が露
出し、平版印¥11版が1尋られる。好ましい現像液と
しては珪酸ナトリウム、珪酸カリウム、水酸化ナトリウ
ム5、イーζ酸化カリウム、水酸化リチウム、第三F2
酸ナトリウム、第二燐酸ナトリウム、第三燐酸カリウム
、第二燐酸カリウム、第三燐酸アンモニウム、第二燐酸
アンモニウム、メタ珪酸ナトリウム、重炭酸ナトリウム
、アンモニア水などのようなm機アルカリ剤、例えばモ
ノエタノールアミン、ジェタノールアミンなどのような
有機アルカリ剤のようなアルカリを少なくとも1種含む
アルカリ水溶液が使用され、特に好ましいアルカリ水溶
液の組成は米国特許第4.259.434号明細書に詳
しく記されている。現像方法は、現像、ガム部両方をも
つ自動現像機および水洗部をもつ通常の自動現像機又は
皿現像、手現像など種々の手段で行うことができる。The positive type 28 plate according to the present invention is produced by exposing the transparent original image to a light source rich in actinic rays such as a carbon arc lamp, mercury lamp, metal halide lamp, or xenon lamp in the same way as in the past, and then developing it with a developer to form a photosensitive layer. The exposed areas are removed to expose the hydrophilic surface of the support underneath and the lithographic stamp is printed. Preferred developing solutions include sodium silicate, potassium silicate, sodium hydroxide 5, potassium e-zeta oxide, lithium hydroxide, and tertiary F2.
alkaline agents such as sodium acid, dibasic sodium phosphate, potassium phosphate, dibasic potassium phosphate, dibasic ammonium phosphate, dibasic ammonium phosphate, sodium metasilicate, sodium bicarbonate, aqueous ammonia, etc., e.g. monoethanol An aqueous alkaline solution containing at least one alkali such as an organic alkaline agent such as amine, jetanolamine, etc. is used, and a particularly preferred composition of the aqueous alkaline solution is detailed in U.S. Pat. No. 4,259,434. There is. The developing method can be carried out by various means such as an automatic developing machine having both a developing and gum section, a normal automatic developing machine having a water washing section, dish development, and manual development.
本発明の0−クレゾール樹脂を含むポジ型感光性組成物
を用いた感光性平版印刷版は、感度を従来の2倍に上げ
ても、現像時間、現像液の希釈率、現像温度等を変化さ
せた場合の感度変化が極めて小さいことが判った。又、
インキ着肉性や耐刷性も低下しないことが判った。The photosensitive lithographic printing plate using the positive-working photosensitive composition containing the 0-cresol resin of the present invention does not change the development time, developer dilution rate, development temperature, etc. even if the sensitivity is doubled compared to the conventional one. It was found that the change in sensitivity was extremely small. or,
It was found that ink receptivity and printing durability did not deteriorate.
以下、実施例によって、本発明を説明する。ただし、本
発明は、これらに限定されるものではない。なお、%は
他に指定のない限り重量%を示す。The present invention will be explained below with reference to Examples. However, the present invention is not limited to these. Note that % indicates weight % unless otherwise specified.
合成例1
0−クレゾール108g、バラホルムアルデヒド90g
及び水200m1!を1000−のフラスコに仕込み、
室温下、攪拌しながら40%水酸化ナトリウム水溶液1
00gを50℃以下で加え、その後50℃で3時間反応
させた。反応終了後室温まで冷却し10%塩酸水溶液で
中和し、メチルイソブチルケトン300mI!を加えた
。水洗分液後0−クレゾール200gを添加し50℃に
し、濃塩酸5−を加え、1時間反応させた。減圧下で濃
縮すると黄色固体150gが得られた。この黄色固体は
7核体以上が15重量%、6核体以下が85重量%の0
−クレゾールノボラック樹脂であった。Synthesis Example 1 108g of 0-cresol, 90g of rose formaldehyde
And 200m1 of water! into a 1000-ml flask,
40% sodium hydroxide aqueous solution 1 at room temperature with stirring
00g was added at a temperature below 50°C, and then reacted at 50°C for 3 hours. After the reaction was completed, it was cooled to room temperature, neutralized with 10% aqueous hydrochloric acid solution, and 300 mI of methyl isobutyl ketone was added. added. After washing with water and separating, 200 g of 0-cresol was added, the temperature was raised to 50°C, concentrated hydrochloric acid 5- was added, and the mixture was reacted for 1 hour. Concentration under reduced pressure gave 150 g of a yellow solid. This yellow solid contains 15% by weight of heptadons or more and 85% by weight of hexanuclides or less.
- It was a cresol novolak resin.
実施例1
厚さ0.24 mmのアルミニウム坂をナイロン・ブラ
シと400メツシユのバミスー水懸濁液を用いその表面
を砂目立てした後、よく水で洗浄した。Example 1 The surface of an aluminum slope with a thickness of 0.24 mm was grained using a nylon brush and 400 mesh of vamisu water suspension, and then thoroughly washed with water.
10%水酸化す) IJウム水溶液50℃で20秒間浸
漬してエツチングした後流水(20℃)で1分間水洗し
た。After etching was carried out by immersion in an IJium aqueous solution (10% hydroxide) at 50°C for 20 seconds, it was washed with running water (20°C) for 1 minute.
次に1.5%の硝酸水溶液を用い20℃において電圧1
0■の正弦波の交流を用い、電気量900クーロン/d
m” において20秒間電気化学的グレイニングを行っ
た後、70℃の20%燐酸中に30秒間浸漬してデスマ
ット処理を行った。十分に水洗後、15%硫酸水溶液(
25℃)中で電圧22Vの直流によって3.0 g /
m″の陽極酸化皮膜を設けた。Next, using a 1.5% nitric acid aqueous solution, the voltage was 1 at 20°C.
Using a sine wave alternating current of 0 ■, the amount of electricity is 900 coulombs/d.
After performing electrochemical graining for 20 seconds at 70°C for 20 seconds, desmutting was performed by immersing the grain in 20% phosphoric acid at 70°C for 30 seconds.After thorough washing with water, 15% aqueous sulfuric acid
3.0 g /
An anodized film of m'' was provided.
この支持体の上に、次の感光液を倹布・乾燥して、乾燥
後の重量で2.5 g / m″の感光層を設け、ポジ
SP版を得た。On this support, the following photosensitive solution was spread and dried to form a photosensitive layer having a dry weight of 2.5 g/m'' to obtain a positive SP plate.
感光液:
ナフトキノン−(1,2)−ジアジ
ド−(2)−5−スルホン酸クロ
ライドとピロガロール・アセトン
樹脂とのエステル化物(米国特°許
第3.635.709号明細書実施例1に記されている
もの。) 0.8 gクレゾール・ホ
ルムアルデヒド樹脂 1.708p−t−ブチルフェ
ノール樹脂 0.05gビクトリアピュアブルー
BOHO,05g2−トリクロロメチル−5−p
−ブトキシスチリルー1,3゜
4−オキサジアゾール 0.06gエチレ
ンジクロライド 18 g2−メトキ
シエチルアセテ−) 12 gクレゾールホ
ルムアルデヒド樹脂として、以下のものを用いた。Photosensitive liquid: Esterified product of naphthoquinone-(1,2)-diazide-(2)-5-sulfonic acid chloride and pyrogallol acetone resin (as described in Example 1 of U.S. Pat. No. 3,635,709). ) 0.8 g Cresol formaldehyde resin 1.708 p-t-butylphenol resin 0.05 g Victoria Pure Blue BOHO, 05 g 2-trichloromethyl-5-p-butoxystyrene 1,3°4-oxa Diazole 0.06 g Ethylene dichloride 18 g 2-methoxyethyl acetate) 12 g As the cresol formaldehyde resin, the following were used.
Δ m−p−クレゾールノボラック樹脂(m体=p体=
60:40.7核体
以上が50重量%、6核体以下が
50重量%) 1.7gB 〈^
)の樹脂1.3gと合成例1で得られた7核体以上が1
5重量%、6核
体以下が85重量%の0−クレゾ
ール・ノボラック樹脂 0.4gC(A)
の樹脂1.3gとへキサヒドロ無水フタル酸
0.4gこのポジ型25版を1週間、
常温常湿で放置した後、3KWのメタルハライドランプ
を光源として、1mの距離から富士写真フィルム;グレ
ースケールを通して60秒間、露光した。次いでSiO
□/Na、Oのモル比が1.2で5iOz含量が1.5
%の珪酸ナトリウム水溶液で、25℃で1分間、5分間
の現像をし、水洗した。それぞれの現像時間でのグレー
スケール段数を読みとり、感度値を求めた。Δ m-p-cresol novolac resin (m-form = p-form =
60: 40.50% by weight of 7-nuclear bodies or more, 50% by weight of 6-nuclear bodies or less) 1.7 gB <^
) with 1.3 g of resin and 7 or more nuclear bodies obtained in Synthesis Example 1.
0-cresol novolak resin with 5% by weight and 85% by weight of 6-nuclear bodies or less 0.4gC(A)
of resin and hexahydrophthalic anhydride
0.4g of this positive type 25 plate for one week.
After being left at room temperature and humidity, the film was exposed to light for 60 seconds through Fuji Photo Film (Gray Scale) from a distance of 1 m using a 3KW metal halide lamp as a light source. Then SiO
□/Na, O molar ratio is 1.2 and 5iOz content is 1.5
% sodium silicate aqueous solution at 25° C. for 1 minute and 5 minutes, and washed with water. The number of grayscale steps at each development time was read to determine the sensitivity value.
への1分間現像の感度を100としたときの相対感度は
以下のようになった。The relative sensitivity was as follows when the sensitivity of 1 minute development was set as 100.
表 1
表1に示されるようにBはAに比べて、1.8倍の感度
を示すにもかかわらず、現像時間による感度変化はAよ
りやや大きい程度である。それに対して、Cは感度はB
と同じであるが、現像時間による感度変化は八よりはる
かに大きいことがわかる。Table 1 As shown in Table 1, although B shows 1.8 times the sensitivity as A, the change in sensitivity due to development time is slightly larger than A. On the other hand, C has a sensitivity of B
However, it can be seen that the sensitivity change due to development time is much larger than 8.
Claims (1)
樹脂とからなるポジ型感光性組成物において、該ノボラ
ック樹脂の5〜40重量%が6核体以下が75重量%以
上のo−クレゾール樹脂であることを特徴とするポジ型
感光性組成物。A positive photosensitive composition comprising an o-quinone diazide compound and an alkali-soluble novolak resin, characterized in that 5 to 40% by weight of the novolak resin is an o-cresol resin containing 75% by weight or more of hexanuclear bodies or less. A positive photosensitive composition.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61234768A JP2652010B2 (en) | 1986-10-02 | 1986-10-02 | Positive photosensitive composition |
DE19873733421 DE3733421A1 (en) | 1986-10-02 | 1987-10-02 | Positive-working photosensitive composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61234768A JP2652010B2 (en) | 1986-10-02 | 1986-10-02 | Positive photosensitive composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6388546A true JPS6388546A (en) | 1988-04-19 |
JP2652010B2 JP2652010B2 (en) | 1997-09-10 |
Family
ID=16976057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61234768A Expired - Lifetime JP2652010B2 (en) | 1986-10-02 | 1986-10-02 | Positive photosensitive composition |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2652010B2 (en) |
DE (1) | DE3733421A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0255359A (en) * | 1988-08-22 | 1990-02-23 | Dainippon Ink & Chem Inc | Positive type photoresist composition |
JPH03200251A (en) * | 1989-12-28 | 1991-09-02 | Nippon Zeon Co Ltd | Positive type resist composition |
JPH04212159A (en) * | 1990-09-07 | 1992-08-03 | Nippon Telegr & Teleph Corp <Ntt> | Positive type resist material |
JP2016057632A (en) * | 2015-11-10 | 2016-04-21 | 日立化成株式会社 | Positive photosensitive resin composition and photosensitive film |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2919142B2 (en) * | 1990-12-27 | 1999-07-12 | 株式会社東芝 | Photosensitive composition and pattern forming method using the same |
DE69602211T2 (en) * | 1995-01-12 | 1999-08-19 | Fuji Photo Film Co Ltd | Photosensitive planographic printing plate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62227144A (en) * | 1986-03-28 | 1987-10-06 | Japan Synthetic Rubber Co Ltd | Positive resin composition sensitive for radiation |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS616647A (en) * | 1984-06-20 | 1986-01-13 | Konishiroku Photo Ind Co Ltd | Photosensitive composition for postive type photosensitive lighographic printing plafe |
-
1986
- 1986-10-02 JP JP61234768A patent/JP2652010B2/en not_active Expired - Lifetime
-
1987
- 1987-10-02 DE DE19873733421 patent/DE3733421A1/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62227144A (en) * | 1986-03-28 | 1987-10-06 | Japan Synthetic Rubber Co Ltd | Positive resin composition sensitive for radiation |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0255359A (en) * | 1988-08-22 | 1990-02-23 | Dainippon Ink & Chem Inc | Positive type photoresist composition |
JPH03200251A (en) * | 1989-12-28 | 1991-09-02 | Nippon Zeon Co Ltd | Positive type resist composition |
JPH04212159A (en) * | 1990-09-07 | 1992-08-03 | Nippon Telegr & Teleph Corp <Ntt> | Positive type resist material |
JP2016057632A (en) * | 2015-11-10 | 2016-04-21 | 日立化成株式会社 | Positive photosensitive resin composition and photosensitive film |
Also Published As
Publication number | Publication date |
---|---|
JP2652010B2 (en) | 1997-09-10 |
DE3733421C2 (en) | 1992-09-03 |
DE3733421A1 (en) | 1988-04-07 |
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