JPS6388434A - Characteristic x ray analysis - Google Patents

Abstract

PURPOSE:To facilitate judgement of elements corresponding to the peak of an analysis data, by displaying a scale indicating the name of known elements or a scale corresponding to wavelength parallel on a CRT with the analysis data being indicated. CONSTITUTION:X rays released from a sample S are spectrally analyzed 1 and the X rays thus analyzed are detected and counted with an X rays detector 2. A spectroscope driver 3 drives a spectroscope 1 by a drive pulse signal of a CPU 4 to perform a wavelength scanning. On the other hand, the CPU 4 counts a spectroscope drive pulse to calculate a wavelength value and stores a detection X ray intensity data from the device 2 and the resulting wavelength value into a memory as addressing signal of the memory. Then, the CPU 4 uses an address data of the memory as X addressing data of an image memory 7 and the X ray intensity data stored as Y addressing data to edit an X ray spectrochemical spectrum image in an image memory 7 and a discrimination scale image data previously stored in the memory within the CPU 4 is transferred to a specified position of the image memory 7 to display 5 a completed image.

Description

DETAILED DESCRIPTION OF THE INVENTION A. Field of Industrial Application The present invention relates to a detection signal discrimination method in an apparatus that performs elemental analysis by spectroscopically detecting radiation emitted from a sample such as EPMA.

When performing qualitative or semi-quantitative analysis of elements by detecting characteristic X-rays using conventional techniques such as EPMA, the analysis data is obtained by scanning a certain wavelength range with an X-ray spectrometer and measuring the X-ray intensity at each wavelength. Obtained by detecting. Analytical judgments are made by illustrating the obtained data as a correlation curve between wavelength and X-ray intensity.

However, when plotting analytical data obtained by an analytical device, conventionally a recorder is used and displayed as a spectrum on recording paper, but the wavelength scanning speed of the X-ray spectrometer and the paper feeding speed of the recorder are different from each other. They were designed to be set independently, and paper was fed at a constant speed. Ikegata: The wavelength scanning speed may differ for each measurement, and if the X-ray spectrometer uses a plane crystal, the relationship between the rotation angle of the crystal and the wavelength is not linear. The wavelength scale interval on the horizontal axis (paper feeding direction) of plotted measurement data is not constant, so to perform elemental analysis from such recorded spectra, it is necessary to refer to the paper feeding speed and the scanning speed of the spectrometer. However, since it is necessary to create a wavelength-corresponding scale 2 each time, it takes time to determine the peak element, resulting in problems such as a decrease in measurement efficiency.

C8 Problems to be Solved by the Invention The present invention solves the above-mentioned problem that it takes time to identify the elements of peaks in analytical data, and allows even non-experts to easily analyze analytical data. The purpose is to make it possible to identify elements corresponding to peaks.

21 Means for Solving the Problems The present invention performs X-ray spectroscopic measurements of elements using EPMA, etc., and displays the obtained analysis data in diagrams on a CRT. By displaying scales or wavelength-corresponding scales in parallel, it is possible to easily determine the peak element or wavelength.

When qualitative or semi-constant analysis of elements is performed using an action X-ray spectrometer and the obtained analysis data is shown in Figure 1, the plotted graph shows wavelength on the horizontal axis and wavelength on the vertical axis. Since the X-ray intensity is displayed on a CRT in this case, the wavelength scale on the horizontal axis corresponds to data calculated from the number of driving pulses of the spectrometer driving device that drives the spectrometer. Parallel to the curve display of this analysis data, a scale image or wavelength scale image with the characteristic X-ray position and element group of each element written at the same wavelength position and wavelength scale interval is displayed, so a scale corresponding to -5 elements is created. This is no longer necessary, and it is now possible to easily determine the element that corresponds to the peak displayed on the CRT.

In Figure 0, which shows an example of the present invention in the Example diagram, S is a sample,
E is an excitation ray that excites the sample S to emit X-rays, and 1 is a wavelength scanning X-ray spectrometer that spectrally spectra the X-rays emitted from the sample S. 2 is an X-ray detector which detects and counts the X-rays separated by the spectrometer 1.

Reference numeral 3 denotes a spectrometer driving device which drives the spectrometer 1 using a drive pulse signal from the CPU 4 to perform wavelength scanning. The CPU 4 counts the spectrometer driving pulses, calculates a wavelength value according to the selected spectroscopic crystal, and sends the detected X-ray intensity data from 2 to the X-ray detector into the memory using the wavelength value as a memory address designation signal. Store.

When displaying an image of the data stored in this memory on the CRT 5, the CPU 4 uses the address data in the memory as X address designation data in the image memory, and the stored X-ray intensity data as Y address designation data in the image memory. The discrimination scale image data, which is edited as an X-ray spectroscopic image and stored in the memory in the CPU in advance, is transferred to a predetermined position in the image memory to complete the display image in the image memory, and then read out and displayed on the CRT. to be displayed.

Figure 2 shows an example of a display image. The scale appearing above in this display image is the discrimination scale, K, L, and M are the codes of the characteristic X-rays, and the vertical line above the horizontal line is the position of the characteristic X-rays. shows,
The elements are displayed below. A vertical cursor line is displayed on the CRT, and when you move the cursor left and right using the keys on the keyboard 6 and align it with one peak, you can read which element the peak belongs to on the discrimination scale above. In the figure, the cursor points to the vanadium La line.

1-1 Effect According to the present invention, since the measured X-ray spectrum is displayed on the CRT, the analysis data plotted and displayed on the CRT is displayed according to a fixed wavelength scale, regardless of the wavelength speed of the spectrometer. Therefore, the element corresponding to the peak can be easily determined using the element-corresponding scale displayed on the CRT, and there is no need to create a wavelength-corresponding scale for each analysis run, improving measurement efficiency by -1. did.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a CR
FIG. 4 is an explanatory diagram of the measurement data and the detection peak signal discrimination scale graphically displayed in T. S: Sample, E: Excitation line. 1... Spectrometer, 2... X-ray detection device. 3... Spectrometer driving device, 4... CPU. 5...CRT, 6...Keyboard. 7... Image memory.

Claims (1)

[Claims] In an analyzer that spectrally spectra the X-rays emitted from an excited sample, the spectrum of the detected signal intensity is displayed on a CRT using the drive signal of the wavelength scanning spectrometer and the detected signal of the spectroscopic X-rays. , A characteristic X-ray analysis method characterized in that a scale indicating peak positions of characteristic X-rays of various elements and names of the elements is displayed on the same wavelength scale in parallel to the wavelength axis of the displayed curve.