JPS6387759U - - Google Patents
Info
- Publication number
- JPS6387759U JPS6387759U JP18180886U JP18180886U JPS6387759U JP S6387759 U JPS6387759 U JP S6387759U JP 18180886 U JP18180886 U JP 18180886U JP 18180886 U JP18180886 U JP 18180886U JP S6387759 U JPS6387759 U JP S6387759U
- Authority
- JP
- Japan
- Prior art keywords
- astigmatism correction
- coil
- electron microscope
- scanning electron
- deflection coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 201000009310 astigmatism Diseases 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18180886U JPS6387759U (pt-PT) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18180886U JPS6387759U (pt-PT) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6387759U true JPS6387759U (pt-PT) | 1988-06-08 |
Family
ID=31127018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18180886U Pending JPS6387759U (pt-PT) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6387759U (pt-PT) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019204694A (ja) * | 2018-05-24 | 2019-11-28 | 株式会社ニューフレアテクノロジー | マルチ電子ビーム画像取得装置及びマルチ電子ビーム光学系の位置決め方法 |
-
1986
- 1986-11-28 JP JP18180886U patent/JPS6387759U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019204694A (ja) * | 2018-05-24 | 2019-11-28 | 株式会社ニューフレアテクノロジー | マルチ電子ビーム画像取得装置及びマルチ電子ビーム光学系の位置決め方法 |