JPS6387448U - - Google Patents
Info
- Publication number
- JPS6387448U JPS6387448U JP18235986U JP18235986U JPS6387448U JP S6387448 U JPS6387448 U JP S6387448U JP 18235986 U JP18235986 U JP 18235986U JP 18235986 U JP18235986 U JP 18235986U JP S6387448 U JPS6387448 U JP S6387448U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- duct
- constructed
- panel
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18235986U JPS6387448U (de) | 1986-11-26 | 1986-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18235986U JPS6387448U (de) | 1986-11-26 | 1986-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6387448U true JPS6387448U (de) | 1988-06-07 |
Family
ID=31128084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18235986U Pending JPS6387448U (de) | 1986-11-26 | 1986-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6387448U (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5944538A (ja) * | 1982-09-06 | 1984-03-13 | Shoji Hirayama | クリ−ンル−ム用クリ−ンユニツトおよびクリ−ンル−ムシステム |
-
1986
- 1986-11-26 JP JP18235986U patent/JPS6387448U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5944538A (ja) * | 1982-09-06 | 1984-03-13 | Shoji Hirayama | クリ−ンル−ム用クリ−ンユニツトおよびクリ−ンル−ムシステム |