JPS6387283A - Optical information recording medium - Google Patents
Optical information recording mediumInfo
- Publication number
- JPS6387283A JPS6387283A JP61232135A JP23213586A JPS6387283A JP S6387283 A JPS6387283 A JP S6387283A JP 61232135 A JP61232135 A JP 61232135A JP 23213586 A JP23213586 A JP 23213586A JP S6387283 A JPS6387283 A JP S6387283A
- Authority
- JP
- Japan
- Prior art keywords
- film
- optical information
- recording medium
- information recording
- content ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims description 38
- 229910052751 metal Inorganic materials 0.000 claims abstract description 34
- 239000002184 metal Substances 0.000 claims abstract description 34
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 239000011521 glass Substances 0.000 claims abstract description 3
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 3
- 239000000057 synthetic resin Substances 0.000 claims abstract description 3
- 125000001183 hydrocarbyl group Chemical group 0.000 claims abstract 2
- 239000000758 substrate Substances 0.000 claims description 23
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000007423 decrease Effects 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 abstract description 9
- 230000006866 deterioration Effects 0.000 abstract description 7
- 229920000515 polycarbonate Polymers 0.000 abstract description 4
- 239000004417 polycarbonate Substances 0.000 abstract description 4
- 238000010494 dissociation reaction Methods 0.000 abstract description 2
- 230000005593 dissociations Effects 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract 2
- 239000004925 Acrylic resin Substances 0.000 abstract 1
- 229920000178 Acrylic resin Polymers 0.000 abstract 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 150000002430 hydrocarbons Chemical group 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/2431—Metals or metalloids group 13 elements (B, Al, Ga, In)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24318—Non-metallic elements
- G11B2007/2432—Oxygen
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24318—Non-metallic elements
- G11B2007/24328—Carbon
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
- G11B7/2531—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
- G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
- G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
Landscapes
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
本発明は、光学的情報記録媒体に係り、特に通常使用さ
れる書込み強度での変１４度を落とすことなく再生劣化
現象を防ぎ、最大の再生ビーム強度をより高めて、より
高密度化を可能とした光学的情報記録媒体に関する。[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to an optical information recording medium, and in particular, the present invention relates to an optical information recording medium, and in particular, the present invention relates to an optical information recording medium, and in particular, the present invention relates to an optical information recording medium, and in particular, the present invention relates to an optical information recording medium, and in particular, the present invention relates to an optical information recording medium, and in particular, the present invention relates to an optical information recording medium, and in particular, the present invention relates to an optical information recording medium, and in particular, the present invention relates to an optical information recording medium. The present invention relates to an optical information recording medium that prevents the problem from occurring, increases the maximum reproduction beam intensity, and enables higher density.
（従来の技術とその問題点）
従来から、例えば特開昭５６−６５３４１号公報や特開
昭５６−１２７９３７号公報に記載されているように、
基板上に形成された加熱によりガスを遊離する成分と金
属成分とからなる記録膜に、情報に対応されたパルス変
調レーザービームを照射し、この記録膜を情報に対応さ
せて局部的に加熱して凸部を形成することにより情報を
記録するようにした光学的記録方式が知られている。(Prior art and its problems) Conventionally, as described in, for example, JP-A-56-65341 and JP-A-56-127937,
A recording film formed on a substrate, consisting of a component that releases gas when heated and a metal component, is irradiated with a pulse modulated laser beam that corresponds to the information, and the recording film is locally heated in accordance with the information. An optical recording method is known in which information is recorded by forming convex portions.
このような光学的記録方式に用いる記録膜には、低エラ
ーレイトであること、および高密度記録が可能なことが
強く要求されている。A recording film used in such an optical recording system is strongly required to have a low error rate and be capable of high-density recording.
低エラーレイトとするためには、再生信号のＳ／Ｎ比を
できるだけ上げる必要があるが、この再生信号のＳ／Ｎ
比は再生ビームパワーの１７２乗に比例して増大するこ
とが知られている。In order to achieve a low error rate, it is necessary to increase the S/N ratio of the reproduced signal as much as possible;
It is known that the ratio increases in proportion to the reproduction beam power to the 172nd power.
したがってＳ／Ｎ比を向上させるためには再生ビームパ
ワーを上げることが有効な手段となるが、このような炭
化水素基を含有する膜のみならず、一般にヒートモード
記録膜においては、再生ビームパワーが過大になると記
録膜の変質（再生劣化）が生じるという本質的な問題が
ある。Therefore, increasing the reproduction beam power is an effective means of improving the S/N ratio, but not only for films containing such hydrocarbon groups, but also for heat mode recording films in general, the reproduction beam power is There is an essential problem that if the amount becomes too large, the quality of the recording film will change (deterioration in reproduction).
すなわち例えば金属１ｎを含有するＣＨ４−０２系スパ
ツタ膜、ＣＨ４０２Ｎ２系スパッタ膜あるいはＣＨ４−
０２−Ｎ２−Ａｒ系スパッタ膜では、第３図に示したよ
うな変調度と書込みビーム強度の関係を示すものが多く
、書込みビーム強度がかなり低い所でも変調度が若干出
ており、このため再生ビーム強度をあまり高くすると記
録膜が変質してしまうという問題があった。That is, for example, a CH4-02 sputtered film containing metal 1n, a CH402N2 sputtered film, or a CH4-
Many of the 02-N2-Ar sputtered films show the relationship between the degree of modulation and the writing beam intensity as shown in Figure 3, and even where the writing beam intensity is quite low, there is a slight degree of modulation. There is a problem in that if the reproduction beam intensity is made too high, the quality of the recording film deteriorates.
さらに高密度記録を実現するためには、記録時のバブル
の形状が小さく、かつ大きさがそろっていることが望ま
しいが、従来の光学的情報記録媒体では、上述したよう
に書込みビーム強度がかなり低い所でも変調度がでるた
めバブル形状が一定しないという問題があった。In order to achieve even higher density recording, it is desirable that the bubbles during recording be small in shape and uniform in size, but in conventional optical information recording media, as mentioned above, the writing beam intensity is quite low. There was a problem that the bubble shape was not constant because the degree of modulation occurred even at low temperatures.
本発明はかかる従来の欠点を解消すべくなされたもので
、記録膜の構造を適切なものとすることにより、通常使
用される書込み強度での変調度を落とすことなく再生劣
化現象の生じない最大の再生ビーム強度をより高め、か
つバブル形状を改善してより高密度化を可能とした光学
的情報記録媒体を提供することを目的とする。The present invention has been made in order to eliminate such conventional drawbacks, and by optimizing the structure of the recording film, it is possible to maximize the maximum level without reducing the modulation degree at the writing intensity normally used without causing reproduction deterioration. An object of the present invention is to provide an optical information recording medium that can further increase the reproduction beam intensity and improve the bubble shape to achieve higher density.
［発明の構成］
（問題点を解決するための手段）
本発明の光学的情報記録媒体は、エネルギービームに対
して透明な基板上に加熱により遊離する０を含むガス成
分と金属成分とからなる記録膜を形成し、この記録膜に
エネルギービームを基板面側から照射して変形部を形成
することにより情報の記録を行なうようにした光学的情
報記録媒体において、前記記録膜の基板界面近傍の０／
金属含有比が膜内部の平均Ｏ／金属含有比より高くされ
ていることを特徴としている。[Structure of the Invention] (Means for Solving the Problems) The optical information recording medium of the present invention consists of a gas component containing 0 that is liberated by heating and a metal component on a substrate that is transparent to energy beams. In an optical information recording medium in which information is recorded by forming a recording film and irradiating the recording film with an energy beam from the substrate surface side to form a deformed part, 0/
It is characterized in that the metal content ratio is higher than the average O/metal content ratio inside the film.
本発明に使用する記録膜は、ＣＨ４−０２系プラズマ、
ＣＨ’４−０２−Ｎ２系プラズマ、あるいはＣ）１４−
０２−Ｎ２−Ａｒ系プラズマを用いてＩｎその他の金剋
ターゲットをスパッタし飛散粒子をエネルギービーム、
例えばレーザービームに透明な基板上に堆積させること
により形成させることができる。The recording film used in the present invention uses CH4-02 plasma,
CH'4-02-N2 plasma or C)14-
02-In and other metal targets are sputtered using N2-Ar plasma, and the scattered particles are exposed to an energy beam.
For example, it can be formed by depositing it on a substrate that is transparent to a laser beam.
このスパッタ膜は、ＣＨ４の解離により生成した炭化水
素基を有し他のガス成分を含有する有機物とターゲット
の金属成分とからなる非晶質物質として形成される。This sputtered film is formed as an amorphous material made of an organic material having hydrocarbon groups generated by dissociation of CH4 and containing other gas components and a metal component of the target.
本発明は、ターゲットとしてＩｎを使用した場合に特に
有効であるが、ｉｎ以外にもＴｅその他の金属を使用す
る場合にも有効である。The present invention is particularly effective when In is used as the target, but it is also effective when using other metals other than In, such as Te.
本発明において記録膜の基板界面近傍のＯ／金属含有比
を膜内部の平均０／金罵含有比より高（する方法として
は次の２つの方法を採ることができる。In the present invention, the following two methods can be used to make the O/metal content ratio near the substrate interface of the recording film higher than the average O/metal content ratio inside the film.
第１の方法は、第１図に示すように、まずＯ／金属含有
比が高いスパッタ膜１１を基板１２上に堆積させ、続い
てその上にこれよりＯ／金属含有比の低いスパッタ膜１
３を重ねて堆積する方法である。また第２の方法は、第
２図に示すように、０／金属含有比を基板１２の界面か
ら順次減少させたスパッタ膜１４を堆積させる方法であ
る（図では０密度を散点の密度で示す）。In the first method, as shown in FIG. 1, a sputtered film 11 with a high O/metal content ratio is deposited on a substrate 12, and then a sputtered film 11 with a lower O/metal content ratio is deposited thereon.
This is a method of depositing 3 layers one on top of the other. The second method is to deposit a sputtered film 14 in which the 0/metal content ratio is gradually decreased from the interface of the substrate 12, as shown in FIG. show).
このように記録膜のＯ／金属含有比を膜厚方向で異なら
せるには、スパッタ時に成膜室内のＣＨ４や０２の分圧
を変えるだけの簡単な操作により行なうことができる。In this way, the O/metal content ratio of the recording film can be varied in the film thickness direction by a simple operation of changing the partial pressure of CH4 or O2 in the film forming chamber during sputtering.
この方法によればＯ／金属含有比を膜厚方向で異ならせ
るためにその他のガスの導入を必要としないので製造コ
ストの増大および成膜室内の汚染を最少限にすることが
できる利点がある。This method does not require the introduction of other gases in order to vary the O/metal content ratio in the film thickness direction, so it has the advantage of minimizing increased manufacturing costs and contamination within the film forming chamber. .
なおこれらのスパッタ膜の厚さは、全体の厚さで６０〜
８０ｎａ＋程度が適当である。The total thickness of these sputtered films is 60~
Approximately 80 na+ is appropriate.
また本発明に使用する基板としては厚さ １．５ｍｍ程
度のポリカーボネート板、アクリル板のような透明な合
成樹脂板やガラス板が使用可能である。Further, as the substrate used in the present invention, a transparent synthetic resin plate such as a polycarbonate plate, an acrylic plate, or a glass plate with a thickness of about 1.5 mm can be used.
このようにして得られる本発明の光学的情報記録媒体の
記録膜は加熱によりガス成分を遊離する性質を有してお
り、これによって形状の整った小さなバブルを形成する
ことができる。The recording film of the optical information recording medium of the present invention obtained in this manner has a property of liberating gas components when heated, thereby making it possible to form small, well-shaped bubbles.
（作用）
本発明の光学的情報記録媒体における記録膜は、レーザ
ービームのようなエネルギービームを照射することによ
り基板界面で炭化水素基などのガス成分が遊離して記録
膜を押し上げ変形部、すなわちバブルを形成する。(Function) When the recording film in the optical information recording medium of the present invention is irradiated with an energy beam such as a laser beam, gas components such as hydrocarbon groups are liberated at the substrate interface, pushing up the recording film and forming a deformed portion, i.e. form a bubble.
そして記録膜の基板界面近傍でのみ吸収されるような低
い強度のビームが照射された場合には、この部分はＯ／
金属含有比が＾いため熱の吸収率が低く、このため炭化
水素の遊離も含有金属の酸化による格子歪みの発生も非
常に生じ難くバブルは形成されない。If a low-intensity beam that is absorbed only near the recording film's substrate interface is irradiated, this area
Since the metal content ratio is low, the heat absorption rate is low, and therefore, it is very difficult to liberate hydrocarbons or cause lattice distortion due to oxidation of the contained metals, and no bubbles are formed.
これに対して強い強度のビームが照射された場合には、
照射によって生じた熱は膜の基板界面のみならず膜厚方
向深部にまで吸収される。そしてこの膜厚方向深部の部
分はＯ／金属含有比が低くされているので吸収率も高く
、吸収された熱により内部からガスが発生してその圧力
によりバブルが形成される。On the other hand, when a strong beam is irradiated,
The heat generated by irradiation is absorbed not only at the substrate interface of the film but also deep in the film thickness direction. Since the O/metal content ratio is low in this deep portion in the film thickness direction, the absorption rate is high, and gas is generated from inside due to the absorbed heat, and bubbles are formed due to the pressure.
従って本発明の光学的情報記録媒体では、従来の膜厚方
向組成を均一としかつ膜組成を最高感度とした記録膜に
比べて書込みしきい値は若干大きくはなるが、これによ
って書込みしきい値強度を再生劣化が生じない程度にま
で高めることができる。なお実使用時のデータの書込み
は、通常書込みしきい値の数倍の強度のエネルギービー
ムで行なわれるので、書込みしきい値の多少の増加はＳ
／Ｎ比等の記録特性に関して何ら問題がない。Therefore, in the optical information recording medium of the present invention, the write threshold value is slightly larger than that of a conventional recording film with a uniform film composition in the thickness direction and the film composition with the highest sensitivity. The strength can be increased to a level that does not cause deterioration due to regeneration. Note that data writing during actual use is normally performed using an energy beam with an intensity several times the writing threshold, so a slight increase in the writing threshold will result in S
There is no problem with recording characteristics such as /N ratio.
また再生ビーム強度を高くとることができるので、同じ
強度で書込んだ時の変調度は従来と同程度の特性とする
ことができ、しかもＳ／Ｎ比を向上させることができる
。Furthermore, since the reproduction beam intensity can be set high, the modulation degree when writing with the same intensity can be made comparable to the conventional characteristic, and the S/N ratio can be improved.
また本発明の光学的情報記録媒体では、書込みの際基板
界面付近での金属酸化物の形成による格子歪みの発生が
少なくなるため形状の整った小さなバブルを形成するこ
とができ、より一層の高密度記録が可能となる。In addition, in the optical information recording medium of the present invention, the occurrence of lattice distortion due to the formation of metal oxide near the substrate interface during writing is reduced, making it possible to form small, well-shaped bubbles, resulting in even higher performance. Density recording becomes possible.
（実施例）
以下、本発明の光学的情報記録媒体の一実施例につき、
図面を用いて詳細に説明する。(Example) Hereinafter, an example of the optical information recording medium of the present invention will be described.
This will be explained in detail using drawings.
実施例
５“径、厚さ１５１１１のディスク状ポリカーボネート
シートを超音波洗浄法により清浄した後、これをマグネ
トロン型直流スパッタリング装置のスパッタ室内の基板
装着台に載せ、１２ｒ、 ｐ、 ｌで回転させながら、
ＣＨ４，０２のガスのプラズマでＩｎをターゲットにし
て以下の条件でスパッタし、第２図に示した構造の記録
膜を成膜した。成膜条件は以下の通りである。Example 5 After cleaning a disc-shaped polycarbonate sheet with a diameter of 15111 mm and a thickness by ultrasonic cleaning, it was placed on a substrate mounting stand in the sputtering chamber of a magnetron-type DC sputtering apparatus, and while rotating at 12 r, p, and l. ,
A recording film having the structure shown in FIG. 2 was formed by sputtering using CH4,02 gas plasma using In as a target under the following conditions. The film forming conditions are as follows.
すなわち、まずスパッタ室内を初期到達真空度を１．Ｏ
Ｘ １Ｏ−ｓＴｏｒｒとしてＡｒを導入してブリスパッ
タを行った。次いでＣＨ４の流量を１３ｓｅｃ＋ａとし
、かつ０２の流量を７ＳＣＣ１から５ｓｃｃｉまで連続
的に変化させながら記録膜の厚さが７５ｎａ＋どなるま
でスパッタを行なった。なおこの時成膜時の圧力調整は
Ｌ型パイトンパルプの開閉により行い５１ＴＯｒｒ−定
とし、スパッタリングパワーは１８０Ｗとした。That is, first, the initial vacuum level in the sputtering chamber is set to 1. O
Bliss sputtering was performed by introducing Ar as X 1O-sTorr. Next, the CH4 flow rate was set to 13 sec+a, and the sputtering was performed while continuously changing the CH4 flow rate from 7SCC1 to 5SCCI until the thickness of the recording film reached 75Na+. At this time, the pressure during film formation was adjusted by opening and closing an L-shaped pyton pulp to maintain a constant value of 51 TOrr, and the sputtering power was 180W.
このようにして作製した光学的情報記録媒体を用いて、
線速１■／Ｓ １パルス幅０．３μｍ１５■Ｗで書込み
、線速が１ｍ／Ｓ 、０．８ｍｗで読み出しを行った
ところ０．４５の変調度が得られた。またこの記録部分
に再生ビームを２０分間連続照射しても再生劣化は生じ
なかった。さらに光学顕微鏡での観察により記録部分の
バブル形状の改善も確認された。Using the optical information recording medium produced in this way,
When writing was performed at a linear velocity of 1 s/s, 1 pulse width of 0.3 μm, and 15 sw, and reading was performed at a linear speed of 1 m/s and 0.8 mw, a modulation degree of 0.45 was obtained. Furthermore, even when this recorded portion was continuously irradiated with a reproduction beam for 20 minutes, no reproduction deterioration occurred. Furthermore, an improvement in the bubble shape of the recorded area was also confirmed by observation using an optical microscope.
これに対して０２の流量を５ｓｃｃ暑で一定として記録
膜の厚さを７５ｎｍとし・た光学的情報記録媒体では、
同一条件で２０％の再生劣化が生じ、また光学顕微鏡で
記録部分を観察したところポリカーボネートシートとの
界面に粗大なバブルが多数党められた。On the other hand, in an optical information recording medium in which the flow rate of 02 is constant at 5scc and the thickness of the recording film is 75nm,
Under the same conditions, 20% reproduction deterioration occurred, and when the recorded portion was observed with an optical microscope, many coarse bubbles were observed at the interface with the polycarbonate sheet.
［発明の効果］
以上のように、本発明の光学的情報記録媒体は、基板界
面近傍のＯ／金属含有比を膜内部の平均０／金属含有比
より高くしたので通常使用される書込み強度での変調度
を落とすことなく再生劣化現象の生じない最大の再生ビ
ーム強度をより高めることができる。しかもバブル形状
も微細な均一なものとなるのでより一層の高密度化が可
能となる。[Effects of the Invention] As described above, the optical information recording medium of the present invention has an O/metal content ratio near the substrate interface that is higher than the average 0/metal content ratio inside the film, so that it can be used with normally used writing intensities. The maximum reproduction beam intensity without causing reproduction deterioration phenomenon can be further increased without reducing the modulation degree. Moreover, since the bubble shape becomes fine and uniform, even higher density can be achieved.
第１図は本発明の一実施例の要部を拡大して示す概略断
面図、第２図は本発明の他の実施例の要部を拡大して示
す概略断面図、第３図は従来の記録膜の変調度と書込み
ビーム強度の関係を示す概略図である。
１１・・・・・・・・・０／金属含有率が高いスパッタ
膜″ １２・・・・・・・・・基板
１３・・・・・・・・・０／金属含有比が低いスパッタ
膜１４・・・・・・・・・０／金属含有比が膜厚方向に
異なるスパッタ膜FIG. 1 is a schematic sectional view showing an enlarged main part of one embodiment of the present invention, FIG. 2 is a schematic sectional view showing an enlarged main part of another embodiment of the present invention, and FIG. 3 is a conventional FIG. 2 is a schematic diagram showing the relationship between the modulation degree of the recording film and the writing beam intensity. 11...0/Sputtered film with high metal content" 12...Substrate 13...0/Sputtered film with low metal content 14・・・・・・・・・0/Sputtered film with different metal content ratio in the film thickness direction
Claims (9)
により遊離するＯを含むガス成分と金属成分とからなる
記録膜を形成し、この記録膜にエネルギービームを基板
面側から照射して変形部を形成することにより情報の記
録を行なうようにした光学的情報記録媒体において、前
記記録膜の基板界面近傍のＯ／金属含有比が膜内部の平
均Ｏ／金属含有比より高くされていることを特徴とする
光学的情報記録媒体。(1) A recording film made of a gas component containing O, which is liberated by heating, and a metal component is formed on a substrate transparent to the energy beam, and this recording film is deformed by irradiating the energy beam from the substrate surface side. In an optical information recording medium in which information is recorded by forming a portion, the O/metal content ratio near the substrate interface of the recording film is higher than the average O/metal content ratio inside the film. An optical information recording medium characterized by:
囲第１項記載の光学的情報記録媒体。(2) The optical information recording medium according to claim 1, wherein the metal component of the recording film is In.
、ＡｒおよびＮなる群から選ばれた少なくとも一種を含
有することを特徴とする特許請求の範囲第１項または第
２項記載の光学的情報記録媒体。(3) The gas component of the recording film contains O and C, and H
The optical information recording medium according to claim 1 or 2, characterized in that the optical information recording medium contains at least one selected from the group consisting of , Ar, and N.
とする特許請求の範囲第１項ないし第３項のいずれか１
項記載の光学的情報記録媒体。(4) Any one of claims 1 to 3, characterized in that the gas component of the recording film contains a hydrocarbon group.
The optical information recording medium described in Section 1.
求の範囲第１項ないし第４項のいずれか１項記載の光学
的情報記録媒体。(5) The optical information recording medium according to any one of claims 1 to 4, wherein the recording film is an amorphous film.
有比の高い層と、これと隣接するこれよりＯ／金属含有
比の低い層とからなることを特徴とする特許請求の範囲
第１項ないし第５項のいずれか１項記載の光学的情報記
録媒体。(6) Claims characterized in that the recording film consists of a layer with a high O/metal content ratio provided near the substrate interface and an adjacent layer with a lower O/metal content ratio. The optical information recording medium according to any one of items 1 to 5.
厚方向の反対側の面にかけて連続的に減少していること
を特徴とする特許請求の範囲第１項ないし第６項のいず
れか１項記載の光学的情報記録媒体。(7) The O/metal content ratio of the recording film continuously decreases from the vicinity of the substrate interface to the opposite surface in the film thickness direction. The optical information recording medium according to any one of the items.
特徴とする特許請求の範囲第１項ないし第７項のいずれ
か１項記載の光学的情報記録媒体。(8) The optical information recording medium according to any one of claims 1 to 7, wherein the energy beam is a laser beam.
あることを特徴とする特許請求の範囲第１項ないし第８
項のいずれか１項記載の光学的情報記録媒体。(9) Claims 1 to 8, characterized in that the substrate is a glass substrate or a transparent synthetic resin substrate.
The optical information recording medium according to any one of paragraphs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61232135A JPS6387283A (en) | 1986-09-30 | 1986-09-30 | Optical information recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61232135A JPS6387283A (en) | 1986-09-30 | 1986-09-30 | Optical information recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6387283A true JPS6387283A (en) | 1988-04-18 |
Family
ID=16934542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61232135A Pending JPS6387283A (en) | 1986-09-30 | 1986-09-30 | Optical information recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6387283A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2334841A1 (en) * | 2008-09-12 | 2011-06-22 | Brigham Young University | Films containing an infused oxygenated gas and methods for their preparation |
-
1986
- 1986-09-30 JP JP61232135A patent/JPS6387283A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2334841A1 (en) * | 2008-09-12 | 2011-06-22 | Brigham Young University | Films containing an infused oxygenated gas and methods for their preparation |
| EP2334841A4 (en) * | 2008-09-12 | 2013-07-17 | Univ Brigham Young | Films containing an infused oxygenated gas and methods for their preparation |
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