JPS6386935U - - Google Patents
Info
- Publication number
- JPS6386935U JPS6386935U JP18246286U JP18246286U JPS6386935U JP S6386935 U JPS6386935 U JP S6386935U JP 18246286 U JP18246286 U JP 18246286U JP 18246286 U JP18246286 U JP 18246286U JP S6386935 U JPS6386935 U JP S6386935U
- Authority
- JP
- Japan
- Prior art keywords
- cover body
- exhaust pipe
- moving table
- exhaust
- communicates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
Description
第1図は本考案の一実施例の平面図、第2図は
同じく正面図、第3図は従来例の平面図、第4図
は同じく正面図である。
11……第1カバー体、12……第1排気管、
13……排気装置、14……第1移動テーブル、
15……第1軸方向、18……第2カバー体、1
9……第2移動テーブル、21……第2軸方向、
23……第2排気管、24……可撓部。
FIG. 1 is a plan view of an embodiment of the present invention, FIG. 2 is a front view, FIG. 3 is a plan view of a conventional example, and FIG. 4 is a front view. 11...first cover body, 12...first exhaust pipe,
13... Exhaust device, 14... First moving table,
15...First axial direction, 18...Second cover body, 1
9...Second moving table, 21...Second axis direction,
23...Second exhaust pipe, 24...Flexible part.
Claims (1)
機構により第1軸方向に送られる第1移動テーブ
ルと、この第1移動テーブル上に設けられた発じ
ん防止した第2カバー体に収容された移動機構に
より第2軸方向に送られる第2移動テーブルと、
上記第1カバー体および排気装置の間を連通する
第1排気管と、上記第2カバー体および排気装置
の間を連通しかつ可撓部をもつた第2排気管とを
具えた発じん防止した多軸送り装置において、上
記第2排気管の上記第1移動テーブルの移動によ
り屈曲する可撓部は上記第1カバー体の中に収容
されていることを特徴とする発じん防止した多軸
送り装置。 A first moving table that is moved in the first axis direction by a moving mechanism housed in a dust-preventing first cover body; a second moving table that is sent in the second axis direction by the moving mechanism;
Dust generation prevention comprising a first exhaust pipe that communicates between the first cover body and the exhaust device, and a second exhaust pipe that communicates between the second cover body and the exhaust device and has a flexible part. In the multi-axis feeding device according to the present invention, a flexible portion of the second exhaust pipe that is bent by the movement of the first moving table is housed in the first cover body. Feeding device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18246286U JPS6386935U (en) | 1986-11-27 | 1986-11-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18246286U JPS6386935U (en) | 1986-11-27 | 1986-11-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6386935U true JPS6386935U (en) | 1988-06-06 |
Family
ID=31128285
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18246286U Pending JPS6386935U (en) | 1986-11-27 | 1986-11-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6386935U (en) |
-
1986
- 1986-11-27 JP JP18246286U patent/JPS6386935U/ja active Pending