JPS6386877U - - Google Patents
Info
- Publication number
- JPS6386877U JPS6386877U JP17872686U JP17872686U JPS6386877U JP S6386877 U JPS6386877 U JP S6386877U JP 17872686 U JP17872686 U JP 17872686U JP 17872686 U JP17872686 U JP 17872686U JP S6386877 U JPS6386877 U JP S6386877U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- movable
- chamber
- movable partition
- fluid introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17872686U JPS6386877U (enExample) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17872686U JPS6386877U (enExample) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6386877U true JPS6386877U (enExample) | 1988-06-06 |
Family
ID=31121132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17872686U Pending JPS6386877U (enExample) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6386877U (enExample) |
-
1986
- 1986-11-20 JP JP17872686U patent/JPS6386877U/ja active Pending
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