JPS6386877U - - Google Patents

Info

Publication number
JPS6386877U
JPS6386877U JP17872686U JP17872686U JPS6386877U JP S6386877 U JPS6386877 U JP S6386877U JP 17872686 U JP17872686 U JP 17872686U JP 17872686 U JP17872686 U JP 17872686U JP S6386877 U JPS6386877 U JP S6386877U
Authority
JP
Japan
Prior art keywords
chuck
movable
chamber
movable partition
fluid introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17872686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17872686U priority Critical patent/JPS6386877U/ja
Publication of JPS6386877U publication Critical patent/JPS6386877U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP17872686U 1986-11-20 1986-11-20 Pending JPS6386877U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17872686U JPS6386877U (enrdf_load_stackoverflow) 1986-11-20 1986-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17872686U JPS6386877U (enrdf_load_stackoverflow) 1986-11-20 1986-11-20

Publications (1)

Publication Number Publication Date
JPS6386877U true JPS6386877U (enrdf_load_stackoverflow) 1988-06-06

Family

ID=31121132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17872686U Pending JPS6386877U (enrdf_load_stackoverflow) 1986-11-20 1986-11-20

Country Status (1)

Country Link
JP (1) JPS6386877U (enrdf_load_stackoverflow)

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