JPS62170172U - - Google Patents

Info

Publication number
JPS62170172U
JPS62170172U JP5830486U JP5830486U JPS62170172U JP S62170172 U JPS62170172 U JP S62170172U JP 5830486 U JP5830486 U JP 5830486U JP 5830486 U JP5830486 U JP 5830486U JP S62170172 U JPS62170172 U JP S62170172U
Authority
JP
Japan
Prior art keywords
chamber
movable
fluid introduction
fluid
material filling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5830486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5830486U priority Critical patent/JPS62170172U/ja
Publication of JPS62170172U publication Critical patent/JPS62170172U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP5830486U 1986-04-18 1986-04-18 Pending JPS62170172U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5830486U JPS62170172U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5830486U JPS62170172U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Publications (1)

Publication Number Publication Date
JPS62170172U true JPS62170172U (enrdf_load_stackoverflow) 1987-10-28

Family

ID=30888762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5830486U Pending JPS62170172U (enrdf_load_stackoverflow) 1986-04-18 1986-04-18

Country Status (1)

Country Link
JP (1) JPS62170172U (enrdf_load_stackoverflow)

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