JPS638579B2 - - Google Patents

Info

Publication number
JPS638579B2
JPS638579B2 JP155886A JP155886A JPS638579B2 JP S638579 B2 JPS638579 B2 JP S638579B2 JP 155886 A JP155886 A JP 155886A JP 155886 A JP155886 A JP 155886A JP S638579 B2 JPS638579 B2 JP S638579B2
Authority
JP
Japan
Prior art keywords
discharge
discharge lamp
wall
microwave
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP155886A
Other languages
Japanese (ja)
Other versions
JPS61179054A (en
Inventor
Kenji Yoshizawa
Hitoshi Kodama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP155886A priority Critical patent/JPS61179054A/en
Publication of JPS61179054A publication Critical patent/JPS61179054A/en
Publication of JPS638579B2 publication Critical patent/JPS638579B2/ja
Granted legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、マイクロ波放電光源装置、とくに
その放電灯の支持に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a microwave discharge light source device, and particularly to support for a discharge lamp thereof.

〔従来の技術〕[Conventional technology]

最近、放電利用の光源装置として高周波放電、
高周波に特にマイクロ波を用いた光源装置が注目
されている。従来の有電極の光源装置では、ラン
プの寿命が電極の消耗により決定されていたが、
マイクロ波を用いた光源装置では、ランプを無電
極にできるため、ランプ寿命が長くなるという特
長がある。また、電極による熱損失がなく、放電
の初期状態と安定状態でインピーダンスの差が小
さいため、安定状態でインピーダンス整合させた
場合でも、初期状態での電力注入が容易であり、
さらに放電電力がランプ管壁に偏つている等のた
めに、最大出力到達までの時間が短くなるという
特長もある。
Recently, high-frequency discharge has been used as a light source device that uses discharge.
Light source devices that use high frequencies, particularly microwaves, are attracting attention. In conventional light source devices with electrodes, the lamp life was determined by the wear and tear of the electrodes.
Light source devices that use microwaves have the advantage of long lamp life because the lamp can be made electrodeless. In addition, there is no heat loss due to the electrodes, and the difference in impedance between the initial state of discharge and the stable state is small, so even if impedance matching is performed in the stable state, power injection in the initial state is easy.
Furthermore, since the discharge power is concentrated on the lamp tube wall, it also has the advantage that the time required to reach the maximum output is shortened.

第2図aは、例えば特開昭56−141165号公報に
示すこのような先行技術によるマイクロ波放電光
源装置の構成を示す断面構成図、第2図bは先行
技術の放電灯を示す断面図である。図において、
1はマグネトロン、2はマグネトロンアンテナ、
3は導波管、4は内壁の形状を回転対称形に形成
されたマイクロ波空胴、40は空胴壁、5は空胴
4と導波管3の接合部に設けられ、マイクロ波が
導入されるマイクロ波給電口、6は球形に形成さ
れた無電極放電灯、6aは管体と一体に形成され
た放電灯支持用の突起、7はフアン、8は導波管
3の一部に設けられた通気口、9は空胴4の前面
を覆う金属メツシユ板、10はマグネトロン1、
導波管3、空胴4等を覆う箱体である。
FIG. 2a is a sectional view showing the structure of a microwave discharge light source device according to the prior art as disclosed in, for example, Japanese Patent Laid-Open No. 56-141165, and FIG. 2b is a sectional view showing the prior art discharge lamp. It is. In the figure,
1 is the magnetron, 2 is the magnetron antenna,
3 is a waveguide, 4 is a microwave cavity whose inner wall is rotationally symmetrical, 40 is a cavity wall, and 5 is provided at the junction between the cavity 4 and the waveguide 3, and the microwave 6 is a spherical electrodeless discharge lamp; 6a is a projection for supporting the discharge lamp formed integrally with the tube body; 7 is a fan; 8 is a part of the waveguide 3; 9 is a metal mesh plate covering the front surface of the cavity 4; 10 is a magnetron 1;
It is a box that covers the waveguide 3, cavity 4, etc.

次に動作について説明する。マグネトロン1に
よつて発生したマイクロ波は、マグネトロンアン
テナ2を通じて導波管3中に放射される。このマ
イクロ波は、導波管3を伝播し、給電口5を通し
て空胴4中に放射され、空胴4中にマイクロ波電
磁界を形成する。このマイクロ波電磁界により、
放電灯6中のガスが放電して放電灯の内壁が熱せ
られ、管内に封入された水銀等の金属が加熱され
て蒸発し、放電は金属ガスの放電に移行し、封入
金属の種類に応じた特定の発光スペクトルを持つ
光が放射される。この光を有効に利用するため、
空胴4の後面で反射面を形成させるとともに、前
面をマイクロ波は透過させないが、光は透過させ
る金属メツシユ板9で覆い、光を前方のみに投射
させている。放電灯6は球形であり、点光源に近
似できるので、空胴4の反射面の形状を回転対称
形とし、この形状を適宜設定することにより、円
形の面域内で所望の照度分布、例えば均一照度が
得られる。なお放電灯6は空胴内のマイクロ波電
磁界分布の変化の少ない位置に置くことができる
ので発光むらは少ないので、均一な照度分布をう
るうえで有利である。
Next, the operation will be explained. Microwaves generated by the magnetron 1 are radiated into a waveguide 3 through a magnetron antenna 2. This microwave propagates through the waveguide 3 and is radiated into the cavity 4 through the feed port 5, forming a microwave electromagnetic field within the cavity 4. This microwave electromagnetic field causes
The gas in the discharge lamp 6 is discharged and the inner wall of the discharge lamp is heated, and the metal such as mercury sealed in the tube is heated and evaporated, and the discharge shifts to a discharge of metal gas, depending on the type of sealed metal. Light with a specific emission spectrum is emitted. In order to make effective use of this light,
A reflective surface is formed on the rear surface of the cavity 4, and the front surface is covered with a metal mesh plate 9 that does not transmit microwaves but transmits light, so that light is projected only forward. Since the discharge lamp 6 is spherical and can be approximated to a point light source, by making the shape of the reflecting surface of the cavity 4 rotationally symmetrical and setting this shape appropriately, a desired illuminance distribution, for example, uniformity, can be achieved within a circular surface area. Provides illuminance. Note that since the discharge lamp 6 can be placed in a position within the cavity where the distribution of the microwave electromagnetic field is less likely to change, there is little unevenness in light emission, which is advantageous in obtaining a uniform illuminance distribution.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

この先行技術によるマイクロ波放電光源装置に
おいて、放電灯6を空胴内に支持するには、空胴
壁面に設置された、放電灯の支持部材を突起6a
と係合させて支持していた。この時支持部材は放
電灯の管壁に直接接触して放電灯を支持するよう
にしていたため、管壁の温度上昇が妨げられ、安
定状態に達するまでの時間が遅くなり、また安定
状態での管壁の温度も低いため、所望の温度を得
るためには大きなマイクロ波電力を必要としてい
た。さらには、支持部材が管壁に接触していると
光放射も妨げられる割合が大きく照度分布にも影
響を及ぼしていた。
In the microwave discharge light source device according to this prior art, in order to support the discharge lamp 6 in the cavity, the discharge lamp support member installed on the cavity wall surface is moved to the protrusion 6a.
It was engaged with and supported. At this time, the support member supported the discharge lamp by directly contacting the tube wall of the discharge lamp, which prevented the temperature rise of the tube wall, slowed down the time it took to reach a stable state, and Since the temperature of the tube wall is also low, a large amount of microwave power is required to obtain the desired temperature. Furthermore, when the support member is in contact with the tube wall, light emission is also obstructed to a large extent, which also affects the illuminance distribution.

この発明は上記のような問題点を解消するため
になされたもので、管壁の温度上昇が容易でマイ
クロ波電力を必要最小限にとどめ、又、照度分布
も均一なものが容易に得られるようにしたもので
ある。
This invention was made to solve the above-mentioned problems, and it is easy to increase the temperature of the tube wall, keep the microwave power to the necessary minimum, and easily obtain a uniform illuminance distribution. This is how it was done.

〔問題点を解決するための手段〕[Means for solving problems]

マイクロ波が導入される給電口を有し、内壁を
形成し、開口を有する空胴壁と、上記開口を塞ぐ
金属メツシユ板とで構成されたマイクロ波空胴、
この空胴内に配設され放電により加熱し蒸発させ
る金属を封入した球形の無電極の放電灯、この放
電灯の管壁に設けられ且つ金属性の棒体が埋設さ
れている1つの突起、上記放電灯の管壁と接触し
ないように上記突起を支持し、上記空胴壁の給電
口を除く部分に保持されて上記放電灯を支持する
支持部材を設ける。
A microwave cavity, which has a power feeding port through which microwaves are introduced, forms an inner wall, and is composed of a cavity wall having an opening, and a metal mesh plate that closes the opening.
A spherical electrodeless discharge lamp disposed within the cavity and enclosing a metal that is heated and evaporated by electric discharge; a protrusion provided on the tube wall of the discharge lamp in which a metal rod is embedded; A support member is provided to support the protrusion so as not to contact the tube wall of the discharge lamp, and to be held in a portion of the cavity wall other than the power supply port to support the discharge lamp.

〔作用〕[Effect]

この発明における放電灯は、支持部材によつて
直接放電灯の管壁から熱を奪われることなく、管
壁の温度上昇が大きく妨げられることはない。
又、放電灯より放射される光が管壁近傍で妨げら
れる割合も少ない。
In the discharge lamp according to the present invention, heat is not directly removed from the tube wall of the discharge lamp by the support member, and the temperature rise of the tube wall is not significantly hindered.
Furthermore, the proportion of light emitted from the discharge lamp being blocked near the tube wall is small.

〔実施例〕〔Example〕

第1図は、この発明の一実施例によるマイクロ
波放電光源装置の要部の拡大断面図であり、14
はマイクロ波空胴4のマイクロ波給電口5の近傍
に取り付けられた石英ガラス等の低損失誘電体で
形成された放電灯支持部材で、ねじが形成された
ねじ穴14aを有する。6aは放電灯6の管体と
一体に形成された支持用の突起で、内部に放電開
始前のマイクロ波電磁界を集中し、放電の始動を
容易にするための金属性の放電始動補助体13が
埋設されている。外面には支持部材14のねじ穴
14aに螺合するねじ6bが形成され、この突起
6aを支持部材14のねじ穴14aに螺合させて
放電灯6を固定する。
FIG. 1 is an enlarged sectional view of a main part of a microwave discharge light source device according to an embodiment of the present invention,
is a discharge lamp support member formed of a low-loss dielectric material such as quartz glass, which is attached near the microwave power supply port 5 of the microwave cavity 4, and has a screw hole 14a in which a screw is formed. Reference numeral 6a denotes a support protrusion formed integrally with the tube body of the discharge lamp 6, which is a metallic discharge starting auxiliary body that concentrates the microwave electromagnetic field before starting the discharge inside and facilitates the starting of the discharge. 13 are buried. A screw 6b is formed on the outer surface to be screwed into the screw hole 14a of the support member 14, and the discharge lamp 6 is fixed by screwing the protrusion 6a into the screw hole 14a of the support member 14.

この様に構成されたマイクロ波放電光源装置に
あつても、先行技術の装置と同様に、放電灯6中
のガスが給電口5を通して空胴4中に放射された
マイクロ波によつて放電・発光する。この放電始
動の時、金属性の放電始動補助体13によつてマ
イクロ波電磁界が集中して、放電灯6近傍で強い
マイクロ波電磁界になつている。このため、放電
灯6中のガスの放電始動が容易である。一度、放
電始動すれば放電灯の内壁が熱せられ、管内に封
入された水銀等の金属が加熱されて蒸気し、放電
が安定状態へと移行する。放電灯の内壁が熱せら
れる際、熱は管壁を通して外壁から外の空気中へ
あるいは突起6aから支持部材14へ逃げる。し
かしながら外壁から外の空気中へは空気の熱伝達
による逃げのため全熱量は少なく、又全周にわた
つてほぼ均一である。さらに、突起6aからは熱
伝導によつて逃げるため、外壁から熱伝達で逃げ
るよりも単位面積当りの熱量は多い。しかしなが
ら突起6aが細いため逃げる全熱量は少ない。特
に先行技術のものように支持部材14が放電灯の
外壁に直接接触しているものは、この支持部材1
4からも熱伝導によつて熱が逃げるため、逃げる
全熱量が多いのに比して、この発明のものは逃げ
る全熱量が少ない。逃げる熱量が少ないことは、
少ないマイクロ波電力で放電灯6内壁の昇温を速
くできることを意味し、安定状態に達するまでの
所要時間を短くでき、又安定状態で所望の温度に
できる。さらに、放電灯6の放電は通常管壁に近
い部分で起こつているが、管壁の温度が低い部分
では放電が中央寄りに管壁から離れる。この発明
のものは突起6aが突出している部分で管壁の温
度が低くなるが、突起6aが細いため、温度の低
い部分の面積が少なく、放電に及ぼす影響も少な
い。したがつて、照度分布への影響も少ない。さ
らに又、支持部材14が直接放電灯6の管壁に接
していないため、放電灯6内部より外へ放射され
る光が支持部材14により邪魔される量は少な
く、均一放射に近い放射分布になる。よつて均一
な照度分布が得易い。
Even in the microwave discharge light source device configured in this way, the gas in the discharge lamp 6 is discharged and discharged by the microwaves radiated into the cavity 4 through the power supply port 5, as in the prior art device. Emits light. At the time of starting the discharge, the microwave electromagnetic field is concentrated by the metallic discharge starting auxiliary body 13, and becomes a strong microwave electromagnetic field near the discharge lamp 6. Therefore, it is easy to start discharging the gas in the discharge lamp 6. Once the discharge starts, the inner wall of the discharge lamp is heated, and the metal such as mercury sealed in the tube is heated and vaporized, and the discharge shifts to a stable state. When the inner wall of the discharge lamp is heated, heat escapes from the outer wall through the tube wall into the outside air or from the projection 6a to the support member 14. However, the total amount of heat is small because it escapes from the outer wall into the outside air by air heat transfer, and is almost uniform over the entire circumference. Furthermore, since the heat escapes from the protrusion 6a by heat conduction, the amount of heat per unit area is greater than if it escapes from the outer wall by heat transfer. However, since the protrusion 6a is thin, the total amount of heat that escapes is small. In particular, when the support member 14 is in direct contact with the outer wall of the discharge lamp, as in the prior art, this support member 1
Since heat also escapes from No. 4 through heat conduction, the total amount of heat that escapes is large, whereas the one of the present invention has a small amount of total heat that escapes. Less heat escapes,
This means that the temperature of the inner wall of the discharge lamp 6 can be quickly raised with less microwave power, the time required to reach a stable state can be shortened, and the desired temperature can be achieved in a stable state. Further, although the discharge of the discharge lamp 6 normally occurs in a portion close to the tube wall, in a portion where the temperature of the tube wall is low, the discharge moves away from the tube wall toward the center. In the device of this invention, the temperature of the tube wall is lowered at the portion where the protrusion 6a protrudes, but since the protrusion 6a is thin, the area of the lower temperature portion is small, and the influence on the discharge is small. Therefore, the influence on the illuminance distribution is also small. Furthermore, since the support member 14 is not in direct contact with the tube wall of the discharge lamp 6, the amount of light emitted from the inside of the discharge lamp 6 to the outside is obstructed by the support member 14 is small, resulting in a radiation distribution that is close to uniform radiation. Become. Therefore, it is easy to obtain a uniform illuminance distribution.

一方、この実施例では突起6aが一方向のみで
あるため、突起や支持部材によつて放電灯6から
の直接の放射光や、空胴4の内壁の反射面からの
反射光が影響を受ける部分が少なく、均一な照度
分布が得易い。
On the other hand, in this embodiment, since the protrusion 6a is oriented in only one direction, the direct emitted light from the discharge lamp 6 and the reflected light from the reflective surface of the inner wall of the cavity 4 are affected by the protrusion and the supporting member. There are few areas and it is easy to obtain a uniform illuminance distribution.

〔発明の効果〕〔Effect of the invention〕

放電灯の管壁に設けられる突起6aが1つのみ
であつても、金属性の棒体13が埋設されている
から、上記突起6aを十分に補強することができ
る。
Even if there is only one protrusion 6a provided on the tube wall of the discharge lamp, the protrusion 6a can be sufficiently reinforced because the metal rod 13 is embedded.

(ii) 他方において、上記金属性の棒体13は放電
始動補助体として作用し、放電始動時にマイク
ロ波電磁界が集中して、放電灯6中のガスの放
電始動が容易になる。
(ii) On the other hand, the metal rod 13 acts as a discharge starting auxiliary body, and the microwave electromagnetic field is concentrated at the time of discharge starting, thereby facilitating the discharge starting of the gas in the discharge lamp 6.

(iii) 1つの金属性の棒体13を突起6a内に埋設
することにより、上記のように機械的な補強プ
ラス電気的には放電始動が容易となり、簡単な
構造でもつて秀れたマイクロ波放電光源装置を
得ることができる。
(iii) By embedding one metal rod 13 in the protrusion 6a, it is mechanically reinforced as described above and electrically it is easy to start the discharge, which makes it possible to create an excellent microwave with a simple structure. A discharge light source device can be obtained.

(iv) 放電灯の支持部材が給電口を被つていないた
め、放電灯が点灯する前に給電口より空胴内に
マイクロ波が放射し易く、放電灯部分でマイク
ロ波電磁界が形成されて放電始動が容易になる
効果がある。
(iv) Since the supporting member of the discharge lamp does not cover the power supply port, microwaves are easily radiated into the cavity from the power supply port before the discharge lamp lights up, and a microwave electromagnetic field is formed in the discharge lamp portion. This has the effect of making it easier to start the discharge.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例によるマイクロ波
放電光源装置を示す要部拡大断面図、第2図aは
先行技術によるマイクロ波放電光源装置の構成を
示す断面構成図、及び第2図bは先行技術の放電
灯を示す断面図である。 図において、4はマイクロ波空胴、5は給電
口、6は放電灯、6aは突起、9は金属メツシユ
板、14は支持部材である。なお、図中、同一符
号は同一、又は相当部分を示す。
FIG. 1 is an enlarged sectional view of essential parts of a microwave discharge light source device according to an embodiment of the present invention, FIG. 2a is a cross-sectional configuration diagram showing the configuration of a microwave discharge light source device according to the prior art, and FIG. 1 is a cross-sectional view of a prior art discharge lamp; FIG. In the figure, 4 is a microwave cavity, 5 is a power supply port, 6 is a discharge lamp, 6a is a projection, 9 is a metal mesh plate, and 14 is a support member. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] 1 マイクロ波が導入される給電口を有し、内壁
に反射面を形成し、開口を有する空胴壁と、上記
開口を塞ぐ金属メツシユ板とで構成されたマイク
ロ波空胴、この空胴内に配設され放電により加熱
し蒸発させる金属を封入した球形の無電極の放電
灯、この放電灯の管壁に設けられ且つ金属性の棒
体が埋設されている1つの突起、上記放電灯の管
壁と接触しないように上記突起を支持し、上記空
胴壁の給電口を除く部分に保持されて上記放電灯
を支持する支持部材を備えたマイクロ波放電光源
装置。
1. A microwave cavity that has a feeding port through which microwaves are introduced, has a reflective surface formed on its inner wall, is composed of a cavity wall that has an opening, and a metal mesh plate that closes the opening; A spherical electrodeless discharge lamp that is disposed in a tube and is filled with metal that is heated and evaporated by electric discharge; a protrusion that is provided on the tube wall of this discharge lamp and has a metal rod embedded therein; A microwave discharge light source device comprising: a support member that supports the protrusion so as not to contact the tube wall, and is held in a portion of the cavity wall other than the power supply port to support the discharge lamp.
JP155886A 1986-01-08 1986-01-08 Microwave discharge light source device Granted JPS61179054A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP155886A JPS61179054A (en) 1986-01-08 1986-01-08 Microwave discharge light source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP155886A JPS61179054A (en) 1986-01-08 1986-01-08 Microwave discharge light source device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP13017180A Division JPS5755057A (en) 1980-09-19 1980-09-19 Microwave discharge light source

Publications (2)

Publication Number Publication Date
JPS61179054A JPS61179054A (en) 1986-08-11
JPS638579B2 true JPS638579B2 (en) 1988-02-23

Family

ID=11504855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP155886A Granted JPS61179054A (en) 1986-01-08 1986-01-08 Microwave discharge light source device

Country Status (1)

Country Link
JP (1) JPS61179054A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0443873U (en) * 1990-08-14 1992-04-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0443873U (en) * 1990-08-14 1992-04-14

Also Published As

Publication number Publication date
JPS61179054A (en) 1986-08-11

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