JPS6384953U - - Google Patents
Info
- Publication number
- JPS6384953U JPS6384953U JP17944886U JP17944886U JPS6384953U JP S6384953 U JPS6384953 U JP S6384953U JP 17944886 U JP17944886 U JP 17944886U JP 17944886 U JP17944886 U JP 17944886U JP S6384953 U JPS6384953 U JP S6384953U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- hook
- rod
- electrostatic chuck
- retreats
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 210000000078 claw Anatomy 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17944886U JPS6384953U (ko) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17944886U JPS6384953U (ko) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384953U true JPS6384953U (ko) | 1988-06-03 |
Family
ID=31122519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17944886U Pending JPS6384953U (ko) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384953U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001027992A1 (fr) * | 1999-10-08 | 2001-04-19 | Nikon Corporation | Mecanisme empechant la chute d'un substrat, et testeur de substrats pourvus d'un tel mecanisme |
-
1986
- 1986-11-20 JP JP17944886U patent/JPS6384953U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001027992A1 (fr) * | 1999-10-08 | 2001-04-19 | Nikon Corporation | Mecanisme empechant la chute d'un substrat, et testeur de substrats pourvus d'un tel mecanisme |
| JP2001110882A (ja) * | 1999-10-08 | 2001-04-20 | Nikon Corp | 基板落下防止機構およびこれを備えた基板検査装置 |
| US6635516B1 (en) | 1999-10-08 | 2003-10-21 | Nikon Corporation | Substrate dropping prevention mechanism and substrate inspection device provided therewith |