JPS6384951U - - Google Patents
Info
- Publication number
- JPS6384951U JPS6384951U JP1986179911U JP17991186U JPS6384951U JP S6384951 U JPS6384951 U JP S6384951U JP 1986179911 U JP1986179911 U JP 1986179911U JP 17991186 U JP17991186 U JP 17991186U JP S6384951 U JPS6384951 U JP S6384951U
- Authority
- JP
- Japan
- Prior art keywords
- facing
- semiconductor wafer
- support body
- supports
- semicircular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986179911U JPS6384951U (enExample) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986179911U JPS6384951U (enExample) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384951U true JPS6384951U (enExample) | 1988-06-03 |
Family
ID=31123392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986179911U Pending JPS6384951U (enExample) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384951U (enExample) |
-
1986
- 1986-11-21 JP JP1986179911U patent/JPS6384951U/ja active Pending