JPS6384933U - - Google Patents
Info
- Publication number
- JPS6384933U JPS6384933U JP18018586U JP18018586U JPS6384933U JP S6384933 U JPS6384933 U JP S6384933U JP 18018586 U JP18018586 U JP 18018586U JP 18018586 U JP18018586 U JP 18018586U JP S6384933 U JPS6384933 U JP S6384933U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- insulating material
- semiconductor manufacturing
- manufacturing equipment
- heat insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000012774 insulation material Substances 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18018586U JPS6384933U (forum.php) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18018586U JPS6384933U (forum.php) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384933U true JPS6384933U (forum.php) | 1988-06-03 |
Family
ID=31123911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18018586U Pending JPS6384933U (forum.php) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384933U (forum.php) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0222596U (forum.php) * | 1988-07-27 | 1990-02-15 |
-
1986
- 1986-11-21 JP JP18018586U patent/JPS6384933U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0222596U (forum.php) * | 1988-07-27 | 1990-02-15 |