JPS6384933U - - Google Patents
Info
- Publication number
- JPS6384933U JPS6384933U JP1986180185U JP18018586U JPS6384933U JP S6384933 U JPS6384933 U JP S6384933U JP 1986180185 U JP1986180185 U JP 1986180185U JP 18018586 U JP18018586 U JP 18018586U JP S6384933 U JPS6384933 U JP S6384933U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- insulating material
- semiconductor manufacturing
- manufacturing equipment
- heat insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180185U JPS6384933U (enExample) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180185U JPS6384933U (enExample) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384933U true JPS6384933U (enExample) | 1988-06-03 |
Family
ID=31123911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986180185U Pending JPS6384933U (enExample) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384933U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0222596U (enExample) * | 1988-07-27 | 1990-02-15 |
-
1986
- 1986-11-21 JP JP1986180185U patent/JPS6384933U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0222596U (enExample) * | 1988-07-27 | 1990-02-15 |