JPS6384012U - - Google Patents

Info

Publication number
JPS6384012U
JPS6384012U JP1986178722U JP17872286U JPS6384012U JP S6384012 U JPS6384012 U JP S6384012U JP 1986178722 U JP1986178722 U JP 1986178722U JP 17872286 U JP17872286 U JP 17872286U JP S6384012 U JPS6384012 U JP S6384012U
Authority
JP
Japan
Prior art keywords
workpiece
vertical shaft
transfer
storage chamber
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986178722U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986178722U priority Critical patent/JPS6384012U/ja
Priority to GB8727183A priority patent/GB2199022B/en
Priority to US07/123,313 priority patent/US4867629A/en
Priority to KR1019870013096A priority patent/KR930002562B1/ko
Publication of JPS6384012U publication Critical patent/JPS6384012U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
  • Linear Motors (AREA)
JP1986178722U 1986-11-20 1986-11-20 Pending JPS6384012U (en:Method)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1986178722U JPS6384012U (en:Method) 1986-11-20 1986-11-20
GB8727183A GB2199022B (en) 1986-11-20 1987-11-20 Dust tight storage cabinet apparatus for use in clean rooms
US07/123,313 US4867629A (en) 1986-11-20 1987-11-20 Dusttight storage cabinet apparatus for use in clean rooms
KR1019870013096A KR930002562B1 (ko) 1986-11-20 1987-11-20 클린룸내에서 사용되는 방진저장 캐비넷장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986178722U JPS6384012U (en:Method) 1986-11-20 1986-11-20

Publications (1)

Publication Number Publication Date
JPS6384012U true JPS6384012U (en:Method) 1988-06-02

Family

ID=31121124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986178722U Pending JPS6384012U (en:Method) 1986-11-20 1986-11-20

Country Status (1)

Country Link
JP (1) JPS6384012U (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002308405A (ja) * 2001-04-16 2002-10-23 Honda Motor Co Ltd リングの収納抽出装置
JP2021027352A (ja) * 2019-07-31 2021-02-22 エーエスエム・アイピー・ホールディング・ベー・フェー 垂直バッチ炉組立体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5168079A (ja) * 1974-12-11 1976-06-12 Mitsubishi Electric Corp Kaitenshikiratsuku
JPS567437U (en:Method) * 1979-06-29 1981-01-22
JPS60140035A (ja) * 1983-12-27 1985-07-24 Daifuku Co Ltd クリ−ンル−ム内の荷搬送設備
JPS61124404A (ja) * 1984-11-22 1986-06-12 Daifuku Co Ltd 荷保管装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5168079A (ja) * 1974-12-11 1976-06-12 Mitsubishi Electric Corp Kaitenshikiratsuku
JPS567437U (en:Method) * 1979-06-29 1981-01-22
JPS60140035A (ja) * 1983-12-27 1985-07-24 Daifuku Co Ltd クリ−ンル−ム内の荷搬送設備
JPS61124404A (ja) * 1984-11-22 1986-06-12 Daifuku Co Ltd 荷保管装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002308405A (ja) * 2001-04-16 2002-10-23 Honda Motor Co Ltd リングの収納抽出装置
JP2021027352A (ja) * 2019-07-31 2021-02-22 エーエスエム・アイピー・ホールディング・ベー・フェー 垂直バッチ炉組立体

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