JPS6383755U - - Google Patents
Info
- Publication number
- JPS6383755U JPS6383755U JP17821686U JP17821686U JPS6383755U JP S6383755 U JPS6383755 U JP S6383755U JP 17821686 U JP17821686 U JP 17821686U JP 17821686 U JP17821686 U JP 17821686U JP S6383755 U JPS6383755 U JP S6383755U
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- resolution
- deposited
- standard sample
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17821686U JPS6383755U (OSRAM) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17821686U JPS6383755U (OSRAM) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6383755U true JPS6383755U (OSRAM) | 1988-06-01 |
Family
ID=31120144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17821686U Pending JPS6383755U (OSRAM) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6383755U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011158257A (ja) * | 2010-01-29 | 2011-08-18 | Hitachi High-Technologies Corp | 像分解能評価用試料，荷電粒子線装置、および試料作成方法 |
-
1986
- 1986-11-21 JP JP17821686U patent/JPS6383755U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011158257A (ja) * | 2010-01-29 | 2011-08-18 | Hitachi High-Technologies Corp | 像分解能評価用試料，荷電粒子線装置、および試料作成方法 |