JPS6382943U - - Google Patents
Info
- Publication number
- JPS6382943U JPS6382943U JP17661386U JP17661386U JPS6382943U JP S6382943 U JPS6382943 U JP S6382943U JP 17661386 U JP17661386 U JP 17661386U JP 17661386 U JP17661386 U JP 17661386U JP S6382943 U JPS6382943 U JP S6382943U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vacuum
- sample holder
- atmosphere
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000609 electron-beam lithography Methods 0.000 claims 2
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17661386U JPS6382943U (nl) | 1986-11-19 | 1986-11-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17661386U JPS6382943U (nl) | 1986-11-19 | 1986-11-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6382943U true JPS6382943U (nl) | 1988-05-31 |
Family
ID=31117024
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17661386U Pending JPS6382943U (nl) | 1986-11-19 | 1986-11-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6382943U (nl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2013039080A1 (ja) * | 2011-09-16 | 2015-03-26 | 住友重機械工業株式会社 | 基板製造装置 |
-
1986
- 1986-11-19 JP JP17661386U patent/JPS6382943U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2013039080A1 (ja) * | 2011-09-16 | 2015-03-26 | 住友重機械工業株式会社 | 基板製造装置 |