JPS6382931U - - Google Patents

Info

Publication number
JPS6382931U
JPS6382931U JP17850186U JP17850186U JPS6382931U JP S6382931 U JPS6382931 U JP S6382931U JP 17850186 U JP17850186 U JP 17850186U JP 17850186 U JP17850186 U JP 17850186U JP S6382931 U JPS6382931 U JP S6382931U
Authority
JP
Japan
Prior art keywords
base
raw material
suspended
wafer holder
storing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17850186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17850186U priority Critical patent/JPS6382931U/ja
Publication of JPS6382931U publication Critical patent/JPS6382931U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP17850186U 1986-11-20 1986-11-20 Pending JPS6382931U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17850186U JPS6382931U (enrdf_load_stackoverflow) 1986-11-20 1986-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17850186U JPS6382931U (enrdf_load_stackoverflow) 1986-11-20 1986-11-20

Publications (1)

Publication Number Publication Date
JPS6382931U true JPS6382931U (enrdf_load_stackoverflow) 1988-05-31

Family

ID=31120690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17850186U Pending JPS6382931U (enrdf_load_stackoverflow) 1986-11-20 1986-11-20

Country Status (1)

Country Link
JP (1) JPS6382931U (enrdf_load_stackoverflow)

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