JPS6382078U - - Google Patents

Info

Publication number
JPS6382078U
JPS6382078U JP17729586U JP17729586U JPS6382078U JP S6382078 U JPS6382078 U JP S6382078U JP 17729586 U JP17729586 U JP 17729586U JP 17729586 U JP17729586 U JP 17729586U JP S6382078 U JPS6382078 U JP S6382078U
Authority
JP
Japan
Prior art keywords
diaphragm
check valve
piezoelectric vibrator
pump
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17729586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17729586U priority Critical patent/JPS6382078U/ja
Publication of JPS6382078U publication Critical patent/JPS6382078U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP17729586U 1986-11-17 1986-11-17 Pending JPS6382078U (bs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17729586U JPS6382078U (bs) 1986-11-17 1986-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17729586U JPS6382078U (bs) 1986-11-17 1986-11-17

Publications (1)

Publication Number Publication Date
JPS6382078U true JPS6382078U (bs) 1988-05-30

Family

ID=31118365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17729586U Pending JPS6382078U (bs) 1986-11-17 1986-11-17

Country Status (1)

Country Link
JP (1) JPS6382078U (bs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5493205A (en) * 1977-12-30 1979-07-24 Matsushita Electric Works Ltd Electrostatic diaphragm pump
JPS5999977A (ja) * 1982-11-26 1984-06-08 Matsushita Electric Ind Co Ltd リニアモ−タ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5493205A (en) * 1977-12-30 1979-07-24 Matsushita Electric Works Ltd Electrostatic diaphragm pump
JPS5999977A (ja) * 1982-11-26 1984-06-08 Matsushita Electric Ind Co Ltd リニアモ−タ

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