JPS6381863U - - Google Patents
Info
- Publication number
- JPS6381863U JPS6381863U JP17465786U JP17465786U JPS6381863U JP S6381863 U JPS6381863 U JP S6381863U JP 17465786 U JP17465786 U JP 17465786U JP 17465786 U JP17465786 U JP 17465786U JP S6381863 U JPS6381863 U JP S6381863U
- Authority
- JP
- Japan
- Prior art keywords
- film
- heat medium
- movable
- disposed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000003028 elevating effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986174657U JPH0619566Y2 (ja) | 1986-11-12 | 1986-11-12 | フィルム基板成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986174657U JPH0619566Y2 (ja) | 1986-11-12 | 1986-11-12 | フィルム基板成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6381863U true JPS6381863U (sr) | 1988-05-30 |
| JPH0619566Y2 JPH0619566Y2 (ja) | 1994-05-25 |
Family
ID=31113248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986174657U Expired - Lifetime JPH0619566Y2 (ja) | 1986-11-12 | 1986-11-12 | フィルム基板成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619566Y2 (sr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010165818A (ja) * | 2009-01-15 | 2010-07-29 | Fuji Electric Holdings Co Ltd | 薄膜光電変換素子の製造方法及び成膜装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59107076A (ja) * | 1982-12-09 | 1984-06-21 | Ricoh Co Ltd | 薄膜形成装置 |
-
1986
- 1986-11-12 JP JP1986174657U patent/JPH0619566Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59107076A (ja) * | 1982-12-09 | 1984-06-21 | Ricoh Co Ltd | 薄膜形成装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010165818A (ja) * | 2009-01-15 | 2010-07-29 | Fuji Electric Holdings Co Ltd | 薄膜光電変換素子の製造方法及び成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0619566Y2 (ja) | 1994-05-25 |