JPS6381861U - - Google Patents

Info

Publication number

JPS6381861U

JPS6381861U JP17736486U JP17736486U JPS6381861U JP S6381861 U JPS6381861 U JP S6381861U JP 17736486 U JP17736486 U JP 17736486U JP 17736486 U JP17736486 U JP 17736486U JP S6381861 U JPS6381861 U JP S6381861U

Authority

JP

Japan

Prior art keywords

sputtering

backing plate

plate

target

overlapping part

Prior art date

1986-11-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004544 sputter deposition Methods 0.000 claims description 5
• 238000001755 magnetron sputter deposition Methods 0.000 claims 1
• 230000002265 prevention Effects 0.000 claims 1
• 239000013077 target material Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)