JPS6381270A - ガスレ−トセンサ - Google Patents

ガスレ−トセンサ

Info

Publication number
JPS6381270A
JPS6381270A JP61224868A JP22486886A JPS6381270A JP S6381270 A JPS6381270 A JP S6381270A JP 61224868 A JP61224868 A JP 61224868A JP 22486886 A JP22486886 A JP 22486886A JP S6381270 A JPS6381270 A JP S6381270A
Authority
JP
Japan
Prior art keywords
electrodes
output signal
gas
power supply
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61224868A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454182B2 (enrdf_load_stackoverflow
Inventor
Yasuatsu Katsuno
勝野　泰諄
Tatsuo Shiozawa
龍雄 塩沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamagawa Seiki Co Ltd
Original Assignee
Tamagawa Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamagawa Seiki Co Ltd filed Critical Tamagawa Seiki Co Ltd
Priority to JP61224868A priority Critical patent/JPS6381270A/ja
Publication of JPS6381270A publication Critical patent/JPS6381270A/ja
Publication of JPH0454182B2 publication Critical patent/JPH0454182B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP61224868A 1986-09-25 1986-09-25 ガスレ−トセンサ Granted JPS6381270A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61224868A JPS6381270A (ja) 1986-09-25 1986-09-25 ガスレ−トセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61224868A JPS6381270A (ja) 1986-09-25 1986-09-25 ガスレ−トセンサ

Publications (2)

Publication Number Publication Date
JPS6381270A true JPS6381270A (ja) 1988-04-12
JPH0454182B2 JPH0454182B2 (enrdf_load_stackoverflow) 1992-08-28

Family

ID=16820426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61224868A Granted JPS6381270A (ja) 1986-09-25 1986-09-25 ガスレ−トセンサ

Country Status (1)

Country Link
JP (1) JPS6381270A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0454182B2 (enrdf_load_stackoverflow) 1992-08-28

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