JPS6380546U - - Google Patents

Info

Publication number
JPS6380546U
JPS6380546U JP1986175401U JP17540186U JPS6380546U JP S6380546 U JPS6380546 U JP S6380546U JP 1986175401 U JP1986175401 U JP 1986175401U JP 17540186 U JP17540186 U JP 17540186U JP S6380546 U JPS6380546 U JP S6380546U
Authority
JP
Japan
Prior art keywords
photomask
alignment
boundary line
alignment mark
figures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986175401U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438355Y2 (US20020193084A1-20021219-M00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986175401U priority Critical patent/JPH0438355Y2/ja
Publication of JPS6380546U publication Critical patent/JPS6380546U/ja
Application granted granted Critical
Publication of JPH0438355Y2 publication Critical patent/JPH0438355Y2/ja
Expired legal-status Critical Current

Links

JP1986175401U 1986-11-17 1986-11-17 Expired JPH0438355Y2 (US20020193084A1-20021219-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986175401U JPH0438355Y2 (US20020193084A1-20021219-M00002.png) 1986-11-17 1986-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986175401U JPH0438355Y2 (US20020193084A1-20021219-M00002.png) 1986-11-17 1986-11-17

Publications (2)

Publication Number Publication Date
JPS6380546U true JPS6380546U (US20020193084A1-20021219-M00002.png) 1988-05-27
JPH0438355Y2 JPH0438355Y2 (US20020193084A1-20021219-M00002.png) 1992-09-08

Family

ID=31114693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986175401U Expired JPH0438355Y2 (US20020193084A1-20021219-M00002.png) 1986-11-17 1986-11-17

Country Status (1)

Country Link
JP (1) JPH0438355Y2 (US20020193084A1-20021219-M00002.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5116878A (en) * 1974-08-01 1976-02-10 Fujitsu Ltd Hoto masukuno seizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5116878A (en) * 1974-08-01 1976-02-10 Fujitsu Ltd Hoto masukuno seizohoho

Also Published As

Publication number Publication date
JPH0438355Y2 (US20020193084A1-20021219-M00002.png) 1992-09-08

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