JPS6379637U - - Google Patents
Info
- Publication number
- JPS6379637U JPS6379637U JP17444686U JP17444686U JPS6379637U JP S6379637 U JPS6379637 U JP S6379637U JP 17444686 U JP17444686 U JP 17444686U JP 17444686 U JP17444686 U JP 17444686U JP S6379637 U JPS6379637 U JP S6379637U
- Authority
- JP
- Japan
- Prior art keywords
- mounting surface
- processing
- wafer mounting
- container
- processing container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005273 aeration Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17444686U JPS6379637U (tr) | 1986-11-13 | 1986-11-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17444686U JPS6379637U (tr) | 1986-11-13 | 1986-11-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6379637U true JPS6379637U (tr) | 1988-05-26 |
Family
ID=31112837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17444686U Pending JPS6379637U (tr) | 1986-11-13 | 1986-11-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6379637U (tr) |
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1986
- 1986-11-13 JP JP17444686U patent/JPS6379637U/ja active Pending