JPS6379633U - - Google Patents

Info

Publication number
JPS6379633U
JPS6379633U JP17256886U JP17256886U JPS6379633U JP S6379633 U JPS6379633 U JP S6379633U JP 17256886 U JP17256886 U JP 17256886U JP 17256886 U JP17256886 U JP 17256886U JP S6379633 U JPS6379633 U JP S6379633U
Authority
JP
Japan
Prior art keywords
solution
substrate
holder
layer
slide boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17256886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17256886U priority Critical patent/JPS6379633U/ja
Publication of JPS6379633U publication Critical patent/JPS6379633U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP17256886U 1986-11-12 1986-11-12 Pending JPS6379633U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17256886U JPS6379633U (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17256886U JPS6379633U (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Publications (1)

Publication Number Publication Date
JPS6379633U true JPS6379633U (enrdf_load_stackoverflow) 1988-05-26

Family

ID=31109227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17256886U Pending JPS6379633U (enrdf_load_stackoverflow) 1986-11-12 1986-11-12

Country Status (1)

Country Link
JP (1) JPS6379633U (enrdf_load_stackoverflow)

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